Influence of High Temperature in the Growth of Low Dislocation Content AlN Bridge Layers on Patterned 6H-SiC Substrates by Metalorganic Vapor Phase Epitaxy
2007 ◽
Vol 46
(No. 14)
◽
pp. L307-L310
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1999 ◽
Vol 38
(Part 1, No. 2B)
◽
pp. 1234-1238
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Keyword(s):
1993 ◽
Vol 32
(Part 2, No. 4A)
◽
pp. L524-L527
◽
2009 ◽
Vol 48
(1)
◽
pp. 011102
◽
2019 ◽
Vol 58
(SC)
◽
pp. SC1002
◽
Keyword(s):