Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition of Borophosphosilicate Glass Films

2008 ◽  
Vol 47 (3) ◽  
pp. 1735-1739 ◽  
Author(s):  
Minghui Yin ◽  
Lingli Zhao ◽  
Xiangyu Xu ◽  
Shouguo Wang
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Chemical Vapor ◽  
Pressure Plasma ◽  
Borophosphosilicate Glass ◽  
Glass Films

Atmospheric pressure plasma enhanced chemical vapor deposition of hydrophobic coatings using fluorine-based liquid precursors

2013 ◽  
Vol 234 ◽  
pp. 21-32 ◽  
Author(s):  
Jacqueline H. Yim ◽  
Victor Rodriguez-Santiago ◽  
André A. Williams ◽  
Theodosia Gougousi ◽  
Daphne D. Pappas ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Chemical Vapor ◽  
Hydrophobic Coatings ◽  
Pressure Plasma ◽  
Liquid Precursors
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