Effect of Water Adsorption on Electrical Characteristics of Porous Silica Films

2008 ◽  
Vol 47 (11) ◽  
pp. 8364-8368 ◽  
Author(s):  
Yasuhisa Kayaba ◽  
Kazuo Kohmura ◽  
Takamaro Kikkawa
2004 ◽  
Vol 812 ◽  
Author(s):  
Nobutoshi Fujii ◽  
Kazuhiro Yamada ◽  
Yoshiaki Oku ◽  
Nobuhiro Hata ◽  
Yutaka Seino ◽  
...  

AbstractPeriodic 2-dimensional (2-D) hexagonal and the disordered pore structure silica films have been developed using nonionic surfactants as the templates. The pore structure was controlled by the static electrical interaction between the micelle of the surfactant and the silica oligomer. No X-ray diffraction peaks were observed for the disordered mesoporous silica films, while the pore diameters of 2.0-4.0 nm could be measured by small angle X-ray scattering spectroscopy. By comparing the properties of the 2-D hexagonal and the disordered porous silica films which have the same porosity, it is found that the disordered porous silica film has advantages in terms of the dielectric constant and Young's modulus as well as the hardness. The disordered porous silica film is more suitable for the interlayer dielectrics for ULSI.


2015 ◽  
Vol 69 (16) ◽  
pp. 39-48 ◽  
Author(s):  
N. Yang ◽  
E. Strelcov ◽  
A. Belianinov ◽  
A. Tebano ◽  
V. Foglietti ◽  
...  

2016 ◽  
Vol 364 ◽  
pp. 822-828 ◽  
Author(s):  
M.T. Nayakasinghe ◽  
A. Chakradhar ◽  
N. Sivapragasam ◽  
U. Burghaus

2004 ◽  
Vol 17 (3) ◽  
pp. 575-580 ◽  
Author(s):  
Masahito Tagawa ◽  
Masashi Ikemura ◽  
Yoshihito Nakayama ◽  
Nobuo Ohmae

2017 ◽  
Vol 320 ◽  
pp. 174-177 ◽  
Author(s):  
Xinwen Zhang ◽  
Gaoling Zhao ◽  
Lingtong Zhan ◽  
Feng Zhan ◽  
Jianxun Wang ◽  
...  

2004 ◽  
pp. 227-231
Author(s):  
G. L. T. Nascimento ◽  
L. M. Seara ◽  
B. R. A. Neves ◽  
N. D. S. Mohallem

2020 ◽  
Vol 79 (10) ◽  
Author(s):  
Bo Liu ◽  
Yanding Sun ◽  
Bo Wang ◽  
Yanhui Han ◽  
Ronghui Zhang ◽  
...  

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