Comparative Studies of Ultra Low-κ Porous Silica Films with 2-D Hexagonal and Disordered Pore Structures

2004 ◽  
Vol 812 ◽  
Author(s):  
Nobutoshi Fujii ◽  
Kazuhiro Yamada ◽  
Yoshiaki Oku ◽  
Nobuhiro Hata ◽  
Yutaka Seino ◽  
...  
Keyword(s):  
Pore Structure ◽  
Nonionic Surfactants ◽  
Porous Silica ◽  
Silica Film ◽  
X Ray Diffraction ◽  
Silica Films ◽  
X Ray ◽  
X Ray Scattering ◽  
Porous Silica Film ◽  
Diffraction Peaks

AbstractPeriodic 2-dimensional (2-D) hexagonal and the disordered pore structure silica films have been developed using nonionic surfactants as the templates. The pore structure was controlled by the static electrical interaction between the micelle of the surfactant and the silica oligomer. No X-ray diffraction peaks were observed for the disordered mesoporous silica films, while the pore diameters of 2.0-4.0 nm could be measured by small angle X-ray scattering spectroscopy. By comparing the properties of the 2-D hexagonal and the disordered porous silica films which have the same porosity, it is found that the disordered porous silica film has advantages in terms of the dielectric constant and Young's modulus as well as the hardness. The disordered porous silica film is more suitable for the interlayer dielectrics for ULSI.

New Structure of CTAB Templated Silica Films as revealed by GISAXS coupled to HRTEM

2000 ◽  
Vol 628 ◽  
Author(s):  
Sophie Besson ◽  
Catherine Jacquiod ◽  
Thierry Gacoin ◽  
André Naudon ◽  
Christian Ricolleau ◽  
...  
Keyword(s):  
Cetyltrimethylammonium Bromide ◽  
Grazing Incidence ◽  
Hexagonal Structure ◽  
X Ray Diffraction ◽  
Electronic Microscopy ◽  
Silica Films ◽  
X Ray ◽  
X Ray Scattering ◽  
Hexagonal Arrangement ◽  
Spherical Micelles

ABSTRACTA microstructural study on surfactant templated silica films is performed by coupling traditional X-Ray Diffraction (XRD) and Transmission Electronic Microscopy (TEM) to Grazing Incidence Small Angle X-Ray Scattering (GISAXS). By this method it is shown that spin-coating of silicate solutions with cationic surfactant cetyltrimethylammonium bromide (CTAB) as a templating agent provides 3D hexagonal structure (space group P63/mmc) that is no longer compatible with the often described hexagonal arrangement of tubular micelles but rather with an hexagonal arrangement of spherical micelles. The extent of the hexagonal ordering and the texture can be optimized in films by varying the composition of the solution.

f-Element Influence on the Size of Nanophase Phosphate Inclusions in Silica

2003 ◽  
Vol 802 ◽  
Author(s):  
James V. Beitz ◽  
S. Skanthakumar ◽  
S. Seifert ◽  
P. Thiyagarajan
Keyword(s):  
Porous Silica ◽  
Vitreous Silica ◽  
Metal Phosphate ◽  
Uranyl Ions ◽  
Pore Collapse ◽  
X Ray Diffraction ◽  
Experimental Conditions ◽  
X Ray ◽  
X Ray Scattering ◽  
Higher Temperature

ABSTRACTInsight into the factors that control the formation and size of heavy metal phosphate nanophases in vitreous silica has been gained by combining conventional and anomalous small angle x-ray scattering studies with powder x-ray diffraction and laser-induced fluorescence investigations. Europium, thorium, and uranyl ions were sorbed from aqueous solutions into a chemically functionalized porous silica (termed Diphosil). Aliquots of those samples were heated to a series of temperatures that spanned the pore collapse point. Loading with trivalent europium ions resulted in production of nanophases whose size corresponded to the average number of metal ions per pore. Thorium or uranyl ions resulted in retention of porosity to higher temperature with eventual pore collapse that evidently resulted in formation of nanophases whose size exceeded that determinable under the experimental conditions.

scholarly journals Pore Structure Control of Ordered Mesoporous Silica Film Using Mixed Surfactants

2011 ◽  
Vol 2011 ◽  
pp. 1-5 ◽  
Author(s):  
Tae-Jung Ha ◽  
Hyeon-Gyoon Im ◽  
Seok-Jin Yoon ◽  
Ho Won Jang ◽  
Hyung-Ho Park
Keyword(s):  
Mesoporous Silica ◽  
Pore Structure ◽  
New Technology ◽  
Silica Film ◽  
Ordered Mesoporous Silica ◽  
X Ray Diffraction ◽  
Silica Films ◽  
Structure Control ◽  
Ordered Mesoporous ◽  
Mesoporous Silica Film

Materials with nanosized and well-arranged pores have been researched actively in order to be applied to new technology fields. Especially, mesoporous material containing various pore structures is expected to have different pore structure. To form a mixed pore structure, ordered mesoporous silica films were prepared with a mixture of surfactant; Brij-76 and P-123 block copolymer. In mixed surfactant system, mixed pore structure was observed in the region of P-123/(Brij-76 + P-123) with about 50.0 wt.% while a single pore structure was observed in regions which have large difference in ratio between Brij-76 and P-123 through the X-ray diffraction analysis. Regardless of surfactant ratio, porosity was retained almost the same. It is expected that ordered mesoporous silica film with mixed pore structure can be one of the new materials which has distinctive properties.

3D Periodic Arrays of Nanoparticles Inside Mesoporous Silica Films

2001 ◽  
Vol 707 ◽  
Author(s):  
Sophie Besson ◽  
Thierry Gacoin ◽  
Catherine Jacquiod ◽  
Christian Ricolleau ◽  
Jean-Pierre Boilot
Keyword(s):  
Mesoporous Silica ◽  
Porous Structure ◽  
Porous Silica ◽  
Silica Film ◽  
Silica Matrix ◽  
Metal Sulfides ◽  
Cds Nanoparticles ◽  
Silica Films ◽  
Periodic Arrays ◽  
Porous Silica Film

ABSTRACTCdS nanoparticles were grown inside a 3D hexagonal porous silica film. The film pore size and organization allowed the perfect control of particle repartition and size (3.5 nm), leading to a 3D nanocrystal array inside the silica matrix. The method was extended to another silica porous structure with larger pores, which allowed to obtain larger particles (5.8 nm). This process was then successfully generalized to other metal sulfides.

3D Periodic Arrays of Nanoparticles Inside Mesoporous Silica Films

2001 ◽  
Vol 704 ◽  
Author(s):  
Sophie Besson ◽  
Thierry Gacoin ◽  
Catherine Jacquiod ◽  
Christian Ricolleau ◽  
Jean-Pierre Boilot
Keyword(s):  
Mesoporous Silica ◽  
Porous Structure ◽  
Porous Silica ◽  
Silica Film ◽  
Silica Matrix ◽  
Metal Sulfides ◽  
Cds Nanoparticles ◽  
Silica Films ◽  
Periodic Arrays ◽  
Porous Silica Film

AbstractCdS nanoparticles were grown inside a 3D hexagonal porous silica film. The film pore size and organization allowed the perfect control of particle repartition and size (3.5 nm), leading to a 3D nanocrystal array inside the silica matrix. The method was extended to another silica porous structure with larger pores, which allowed to obtain larger particles (5.8 nm). This process was then successfully generalized to other metal sulfides.

Control of the phase composition of advanced calcium phosphates using an x-ray diffractometer with a curved position-sensitive detector

2020 ◽  
Vol 86 (6) ◽  
pp. 29-35
Author(s):  
V. P. Sirotinkin ◽  
O. V. Baranov ◽  
A. Yu. Fedotov ◽  
S. M. Barinov
Keyword(s):  
Phase Composition ◽  
Calcium Phosphates ◽  
Position Sensitive Detector ◽  
Sensitive Detector ◽  
X Ray Diffraction ◽  
X Ray ◽  
Impurity Phases ◽  
Position Sensitive ◽  
Diffraction Peaks ◽  
Diffraction Patterns

The results of studying the phase composition of advanced calcium phosphates Ca10(PO4)6(OH)2, β-Ca3(PO4)2, α-Ca3(PO4)2, CaHPO4 · 2H2O, Ca8(HPO4)2(PO4)4 · 5H2O using an x-ray diffractometer with a curved position-sensitive detector are presented. Optimal experimental conditions (angular positions of the x-ray tube and detector, size of the slits, exposure time) were determined with allowance for possible formation of the impurity phases during synthesis. The construction features of diffractometers with a position-sensitive detector affecting the profile characteristics of x-ray diffraction peaks are considered. The composition for calibration of the diffractometer (a mixture of sodium acetate and yttrium oxide) was determined. Theoretical x-ray diffraction patterns for corresponding calcium phosphates are constructed on the basis of the literature data. These x-ray diffraction patterns were used to determine the phase composition of the advanced calcium phosphates. The features of advanced calcium phosphates, which should be taken into account during the phase analysis, are indicated. The powder of high-temperature form of tricalcium phosphate strongly adsorbs water from the environment. A strong texture is observed on the x-ray diffraction spectra of dicalcium phosphate dihydrate. A rather specific x-ray diffraction pattern of octacalcium phosphate pentahydrate revealed the only one strong peak at small angles. In all cases, significant deviations are observed for the recorded angular positions and relative intensity of the diffraction peaks. The results of the study of experimentally obtained mixtures of calcium phosphate are presented. It is shown that the graphic comparison of experimental x-ray diffraction spectra and pre-recorded spectra of the reference calcium phosphates and possible impurity phases is the most effective method. In this case, there is no need for calibration. When using this method, the total time for analysis of one sample is no more than 10 min.

scholarly journals X-ray and Neutron Study on the Structure of Hydrous SiO2 Glass up to 10 GPa

Minerals ◽  
2020 ◽  
Vol 10 (1) ◽  
pp. 84 ◽  
Author(s):  
Satoru Urakawa ◽  
Toru Inoue ◽  
Takanori Hattori ◽  
Asami Sano-Furukawa ◽  
Shinji Kohara ◽  
...  
Keyword(s):  
Oxide Glasses ◽  
Void Space ◽  
X Ray Diffraction ◽  
Amorphous Sio2 ◽  
Sio2 Glass ◽  
X Ray ◽  
X Ray Scattering ◽  
Medium Range ◽  
Two Phases ◽  
A Minor

The structure of hydrous amorphous SiO2 is fundamental in order to investigate the effects of water on the physicochemical properties of oxide glasses and magma. The hydrous SiO2 glass with 13 wt.% D2O was synthesized under high-pressure and high-temperature conditions and its structure was investigated by small angle X-ray scattering, X-ray diffraction, and neutron diffraction experiments at pressures of up to 10 GPa and room temperature. This hydrous glass is separated into two phases: a major phase rich in SiO2 and a minor phase rich in D2O molecules distributed as small domains with dimensions of less than 100 Å. Medium-range order of the hydrous glass shrinks compared to the anhydrous SiO2 glass by disruption of SiO4 linkage due to the formation of Si–OD deuterioxyl, while the response of its structure to pressure is almost the same as that of the anhydrous SiO2 glass. Most of D2O molecules are in the small domains and hardly penetrate into the void space in the ring consisting of SiO4 tetrahedra.

Time-resolved isothermal crystallization of absorbable PGA-co-PLA copolymer by synchrotron small-angle X-ray scattering and wide-angle X-ray diffraction

Polymer ◽  
2001 ◽  
Vol 42 (21) ◽  
pp. 8965-8973 ◽  
Author(s):  
Zhi-Gang Wang ◽  
Xuehui Wang ◽  
Benjamin S. Hsiao ◽  
Saša Andjelić ◽  
Dennis Jamiolkowski ◽  
...  
Keyword(s):  
Small Angle ◽  
Isothermal Crystallization ◽  
Wide Angle ◽  
X Ray Diffraction ◽  
Time Resolved ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

An X-ray scattering study on inverted Ge–Si huts grown at low temperatures

2004 ◽  
Vol 19 (4) ◽  
pp. 347-351
Author(s):  
J. Xu ◽  
X. S. Wu ◽  
B. Qian ◽  
J. F. Feng ◽  
S. S. Jiang ◽  
...  
Keyword(s):  
Low Temperatures ◽  
Lattice Strain ◽  
Lattice Mismatch ◽  
Grazing Incidence ◽  
X Ray Diffraction ◽  
X Ray ◽  
X Ray Scattering ◽  
Transmission Electron ◽  
Large Lattice ◽  
Scattering Study

Ge–Si inverted huts, which formed at the Si∕Ge interface of Si∕Ge superlattice grown at low temperatures, have been measured by X-ray diffraction, grazing incidence X-ray specular and off-specular reflectivities, and transmission electron microscopy (TEM). The surface of the Si∕Ge superlattice is smooth, and there are no Ge–Si huts appearing on the surface. The roughness of the surfaces is less than 3 Å. Large lattice strain induced by lattice mismatch between Si and Ge is found to be relaxed because of the intermixing of Ge and Si at the Si∕Ge interface.

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