Evaluation of Electron Energy Distribution Function in Microwave Discharge Plasmas by Spectroscopic Diagnostics with Collisional Radiative Model
2010 ◽
Vol 49
(3)
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pp. 036001
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1985 ◽
Vol 18
(3)
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pp. 347-358
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2002 ◽
Vol 41
(Part 1, No. 8)
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pp. 5432-5441
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2012 ◽
Vol 21
(2)
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pp. 025004
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1992 ◽
Vol 112
(12)
◽
pp. 1015-1019
1994 ◽
Vol 27
(2)
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pp. 301-311
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