End-Point Detection of Ta/TaN Chemical Mechanical Planarization via Forces Analysis

Accurate determination of a chemical mechanical planarization (CMP) process reaching the end point is an important problem in the CMP process. In present work, the variation of the motor power signal of the polishing platen in the CMP process has been investigated, and the moving average method with 121-points moving window was used to smooth the original signal curve. Experiment results showed that the processed signal could facilitate the extraction of end-point feature for the in-situ end-point detection (EPD) system and it was relatively steady before and after the layer transition stage, which made it more reliable to detect the end point in situ. Comparing with other EPD methods, the system was less complicated, and it was easier to code for algorithm development. Finally, further analysis was performed and series of experiments provided a planarized via-revealed surface with low via dishing.

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Verification of Operation Principle on End Point Detection by Skin Effect in Chemical Mechanical Planarization

ECS Journal of Solid State Science and Technology ◽

10.1149/2.0201708jss ◽

2017 ◽

Vol 6 (8) ◽

pp. P535-P541 ◽

Cited By ~ 4

Author(s):

Takashi Fujita ◽

Keita Kitade

Keyword(s):

Skin Effect ◽

Chemical Mechanical Planarization ◽

End Point ◽

End Point Detection ◽

Point Detection

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Broad-Band Optical End-Point Detection for Linear Chemical-Mechanical Planarization Processes Using an Image Matching Technique

Dynamic Systems and Control, Parts A and B ◽

10.1115/imece2004-59212 ◽

2004 ◽

Author(s):

Jingang Yi ◽

C. Shan Xu

Keyword(s):

Image Matching ◽

Removal Rate ◽

Chemical Mechanical Planarization ◽

Reference Image ◽

Spectral Image ◽

End Point ◽

Matching Technique ◽

End Point Detection ◽

Matching Criteria ◽

Point Detection

In this paper we discuss an end-point detection (EPD) method for the dielectric linear chemical-mechanical planarization (CMP) processes. The proposed EPD algorithms utilize the interferometry optical signals to determine the film post-thicknesses. A set of collected broadband spectral signals is formed as an spectral image. An image-matching technique is then used to match the pre-processed signal image to the reference image template obtained at the target film thickness. Several matching criteria are discussed and compared. We find that the image correlation coefficient is a good indicator to determine the process end-point. We also consider the impact of the material removal rate variations on the interferometry spectral signals. An analytical calculation is carried out to find an extraction and compression searching range of the spectral image to compensate for the removal rate uncertainties in real processes. The correctness and effectiveness of the proposed algorithms have been demonstrated through applications to an inter-metal dielectric (IMD) device CMP process. Compared with other optical EPD methods, the proposed image-matching method are robust to the CMP process variations.

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Acid number, viscosity and end-point detection in a multiphase high temperature polymerisation process using an online miniaturised MEMS Fabry-Pérot interferometer

Talanta ◽

10.1016/j.talanta.2020.121735 ◽

2021 ◽

Vol 224 ◽

pp. 121735

Author(s):

Claudio Avila ◽

Christos Mantzaridis ◽

Joan Ferré ◽

Rodrigo Rocha de Oliveira ◽

Uula Kantojärvi ◽

...

Keyword(s):

High Temperature ◽

Acid Number ◽

End Point ◽

Fabry Perot ◽

End Point Detection ◽

Point Detection

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Fluoroimmunoassay for human choriomammotropin.

Clinical Chemistry ◽

10.1093/clinchem/25.6.973 ◽

1979 ◽

Vol 25 (6) ◽

pp. 973-975 ◽

Cited By ~ 14

Author(s):

T Chard ◽

A Sykes

Keyword(s):

Equipment Design ◽

Radiation Hazard ◽

Human Origin ◽

End Point ◽

End Point Detection ◽

Purified Antigen ◽

Point Detection

Abstract We describe an immunoassay for human choriomammo-tropin by use of the fluorescein-labeled hormone (of human origin). The technique is generally similar to the radioimmunoassay for this material, but has the advantage of stability of tracer and avoidance of radiation hazard. However, the procedure requires approximately 50-fold more tracer than does the radioimmunoassay, and this would be a disadvantage with materials for which supplies of purified antigen are scarce. Furthermore, both within-assay variation (3.9%) and between-assay variation (7.8--7.9%) were less satisfactory than that of radioimmunoassay (1.5% and 2.2--3%, respectively). This is almost certainly the result of imprecision of end-point detection and could probably be corrected by further attention to equipment design.

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