Time-Resolved Quantum Cascade Laser Absorption Spectroscopy of Pulsed Plasma Assisted Chemical Vapor Deposition Processes Containing BCl$_{3}$

2011 ◽  
Vol 50 (8) ◽  
pp. 08JB04 ◽  
Author(s):  
Norbert Lang ◽  
Frank Hempel ◽  
Siegfried Strämke ◽  
Jürgen Röpcke
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