Time-Resolved Quantum Cascade Laser Absorption Spectroscopy of Pulsed Plasma Assisted Chemical Vapor Deposition Processes Containing BCl3

Japanese Journal of Applied Physics ◽

10.7567/jjap.50.08jb04 ◽

2011 ◽

Vol 50 (8S1) ◽

pp. 08JB04 ◽

Author(s):

Norbert Lang ◽

Frank Hempel ◽

Siegfried Strämke ◽

Jürgen Röpcke

Keyword(s):

Chemical Vapor Deposition ◽

Absorption Spectroscopy ◽

Quantum Cascade Laser ◽

Vapor Deposition ◽

Chemical Vapor ◽

Pulsed Plasma ◽

Time Resolved ◽

Quantum Cascade ◽

Laser Absorption ◽

Deposition Processes

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Time-Resolved Quantum Cascade Laser Absorption Spectroscopy of Pulsed Plasma Assisted Chemical Vapor Deposition Processes Containing BCl$_{3}$

Japanese Journal of Applied Physics ◽

10.1143/jjap.50.08jb04 ◽

2011 ◽

Vol 50 (8) ◽

pp. 08JB04 ◽

Author(s):

Norbert Lang ◽

Frank Hempel ◽

Siegfried Strämke ◽

Jürgen Röpcke

Keyword(s):

Chemical Vapor Deposition ◽

Absorption Spectroscopy ◽

Quantum Cascade Laser ◽

Vapor Deposition ◽

Chemical Vapor ◽

Pulsed Plasma ◽

Time Resolved ◽

Quantum Cascade ◽

Laser Absorption ◽

Deposition Processes

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Application of a Quantum Cascade Laser for Time-Resolved, in Situ Probing of CH4/H2and C2H2/H2Gas Mixtures during Microwave Plasma Enhanced Chemical Vapor Deposition of Diamond

The Journal of Physical Chemistry A ◽

10.1021/jp056622u ◽

2006 ◽

Vol 110 (8) ◽

pp. 2821-2828 ◽

Author(s):

A. Cheesman ◽

J. A. Smith ◽

M. N. R. Ashfold ◽

N. Langford ◽

S. Wright ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Quantum Cascade Laser ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Time Resolved ◽

Quantum Cascade

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Injectorless quantum cascade laser with low voltage defect and improved thermal performance grown by metal-organic chemical-vapor deposition

Applied Physics Letters ◽

10.1063/1.3089362 ◽

2009 ◽

Vol 94 (8) ◽

pp. 081109 ◽

Author(s):

Dibyendu Dey ◽

Wei Wu ◽

Omer Gokalp Memis ◽

Hooman Mohseni

Keyword(s):

Chemical Vapor Deposition ◽

Thermal Performance ◽

Quantum Cascade Laser ◽

Vapor Deposition ◽

Low Voltage ◽

Chemical Vapor ◽

Organic Chemical ◽

Quantum Cascade ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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NO kinetics in pulsed low-pressure plasmas studied by time-resolved quantum cascade laser absorption spectroscopy

Plasma Sources Science and Technology ◽

10.1088/0963-0252/20/1/015020 ◽

2011 ◽

Vol 20 (1) ◽

pp. 015020 ◽

Author(s):

S Welzel ◽

O Guaitella ◽

C Lazzaroni ◽

C D Pintassilgo ◽

A Rousseau ◽

...

Keyword(s):

Absorption Spectroscopy ◽

Quantum Cascade Laser ◽

Low Pressure ◽

Laser Absorption Spectroscopy ◽

Time Resolved ◽

Quantum Cascade ◽

Laser Absorption

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On time resolved gas temperature measurements in a pulsed dc plasma using quantum cascade laser absorption spectroscopy

Measurement Science and Technology ◽

10.1088/0957-0233/23/11/115602 ◽

2012 ◽

Vol 23 (11) ◽

pp. 115602 ◽

Author(s):

M Hübner ◽

D Marinov ◽

O Guaitella ◽

A Rousseau ◽

J Röpcke

Keyword(s):

Absorption Spectroscopy ◽

Quantum Cascade Laser ◽

Temperature Measurements ◽

Gas Temperature ◽

Laser Absorption Spectroscopy ◽

Dc Plasma ◽

Time Resolved ◽

Quantum Cascade ◽

Laser Absorption ◽

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Surface vibrational relaxation of N2studied by CO2titration with time-resolved quantum cascade laser absorption spectroscopy

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/45/17/175201 ◽

2012 ◽

Vol 45 (17) ◽

pp. 175201 ◽

Author(s):

D Marinov ◽

D Lopatik ◽

O Guaitella ◽

M Hübner ◽

Y Ionikh ◽

...

Keyword(s):

Absorption Spectroscopy ◽

Quantum Cascade Laser ◽

Vibrational Relaxation ◽

Laser Absorption Spectroscopy ◽

Time Resolved ◽

Quantum Cascade ◽

Laser Absorption

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Injectorless Quantum Cascade Laser with very low voltage-defect grown by metal-organic chemical vapor deposition

LEOS 2008 - 21st Annual Meeting of the IEEE Lasers and Electro-Optics Society ◽

10.1109/leos.2008.4688863 ◽

2008 ◽

Author(s):

Dibyendu Dey ◽

Wei Wu ◽

Omer Gokalp Memis ◽

Hooman Mohseni

Keyword(s):

Chemical Vapor Deposition ◽

Quantum Cascade Laser ◽

Vapor Deposition ◽

Low Voltage ◽

Chemical Vapor ◽

Organic Chemical ◽

Quantum Cascade ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Quantum cascade laser investigations of CH4 and C2H2 interconversion in hydrocarbon/H2 gas mixtures during microwave plasma enhanced chemical vapor deposition of diamond

Journal of Applied Physics ◽

10.1063/1.3176971 ◽

2009 ◽

Vol 106 (3) ◽

pp. 033305 ◽

Author(s):

Jie Ma ◽

Andrew Cheesman ◽

Michael N. R. Ashfold ◽

Kenneth G. Hay ◽

Stephen Wright ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Quantum Cascade Laser ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Gas Mixtures ◽

Quantum Cascade

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Time-resolved study of a pulsed dc discharge using quantum cascade laser absorption spectroscopy: NO and gas temperature kinetics

Plasma Sources Science and Technology ◽

10.1088/0963-0252/16/4/018 ◽

2007 ◽

Vol 16 (4) ◽

pp. 822-831 ◽

Author(s):

S Welzel ◽

L Gatilova ◽

J Röpcke ◽

A Rousseau

Keyword(s):

Absorption Spectroscopy ◽

Quantum Cascade Laser ◽

Gas Temperature ◽

Laser Absorption Spectroscopy ◽

Time Resolved ◽

Quantum Cascade ◽

Laser Absorption ◽

Dc Discharge ◽

Pulsed Dc ◽

Pulsed Dc Discharge

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Theoretical Study of Laser-Stimulated Chemical Vapor Deposition Processes of Importance in Microelectronics.

10.21236/ada136433 ◽

1983 ◽

Author(s):

T. F. George

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Theoretical Study ◽

Chemical Vapor ◽

Deposition Processes

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