Theoretical Study of Laser-Stimulated Chemical Vapor Deposition Processes of Importance in Microelectronics.
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2005 ◽
Vol 12
(4)
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pp. 400-402
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1996 ◽
Vol 14
(2)
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pp. 415-424
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1984 ◽
pp. 317-328
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2008 ◽
Vol 20
(2)
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pp. 025701
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