Three-Dimensional Integration of Fully Depleted Silicon-on-Insulator Transistor Substrates for CMOS Image Sensors Using Au/SiO2 Hybrid Bonding and XeF2 Etching

2014 ◽  
Vol 64 (5) ◽  
pp. 391-396 ◽  
Author(s):  
K. Hagiwara ◽  
M. Goto ◽  
Y. Iguchi ◽  
H. Ohtake ◽  
T. Saraya ◽  
...  
Keyword(s):  
Three Dimensional ◽  
Image Sensors ◽  
Silicon On Insulator ◽  
Fully Depleted ◽  
Cmos Image Sensors

(Invited) Application of Three Dimensional Chip Stacking Technology for Fully Depleted Silicon-on-Insulator Quantum Beam Imager

2019 ◽  
Vol 92 (5) ◽  
pp. 29-38
Author(s):  
Ikuo Kurachi ◽  
Toru Tsuboyama ◽  
Yasuo Arai ◽  
Makoto Motoyoshi
Keyword(s):  
Three Dimensional ◽  
Silicon On Insulator ◽  
Fully Depleted

Investigation of a Sequential Three-Dimensional Process for Back-Illuminated CMOS Image Sensors With Miniaturized Pixels

2009 ◽  
Vol 56 (11) ◽  
pp. 2403-2413 ◽  
Author(s):  
Perceval Coudrain ◽  
Pierre Magnan ◽  
Perrine Batude ◽  
Xavier Gagnard ◽  
CÉdric Leyris ◽  
...  
Keyword(s):  
Three Dimensional ◽  
Image Sensors ◽  
Cmos Image Sensors ◽  
Back Illuminated
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