Real Time Spectroscopic Ellipsometry Study on Growth Processes of ZrO[sub 2] Thin Films in Metallorganic Chemical Vapor Deposition

Real Time ◽

Vapor Deposition ◽

Chemical Vapor ◽

Growth Processes

Unveiling a critical thickness in photocatalytic TiO2 thin films grown by plasma-enhanced chemical vapor deposition using real time in situ spectroscopic ellipsometry

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/ac1ec1 ◽

2021 ◽

Vol 54 (44) ◽

pp. 445303

Author(s):

W Ravisy ◽

M Richard-Plouet ◽

B Dey ◽

S Bulou ◽

P Choquet ◽

...

Keyword(s):

Thin Films ◽

Real Time ◽

Vapor Deposition ◽

Critical Thickness ◽

Chemical Vapor ◽

Tio2 Thin Films ◽

Photocatalytic Tio2

In situ studies of the amorphous to microcrystalline transition of hot-wire chemical vapor deposition Si:H films using real-time spectroscopic ellipsometry

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1564037 ◽

2003 ◽

Vol 21 (4) ◽

pp. 1545-1549 ◽

Cited By ~ 5

Author(s):

D. H. Levi ◽

B. P. Nelson ◽

J. D. Perkins ◽

H. R. Moutinho

Keyword(s):

Real Time ◽

Vapor Deposition ◽

Chemical Vapor ◽

Hot Wire ◽

In Situ Studies

In situreal-time spectroscopic ellipsometry study of HfO2 thin films grown by using the pulsed-source metal-organic chemical-vapor deposition

10.1063/1.1827912 ◽

2005 ◽

Vol 97 (2) ◽

pp. 023527 ◽

Cited By ~ 7

Author(s):

Yangdong Zheng ◽

Hiroshi Mizuta ◽

Yoshishige Tsuchiya ◽

Masato Endo ◽

Daisuke Sato ◽

...

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Real time measurements of charged gas phase nuclei during the deposition of silicon thin films by hot wire chemical vapor deposition

Current Applied Physics ◽

10.1016/j.cap.2012.12.016 ◽

2013 ◽

Vol 13 ◽

pp. S45-S49 ◽

Cited By ~ 2

Author(s):

Ju-Seop Hong ◽

Chan-Soo Kim ◽

Seung-Wan Yoo ◽

Seong-Han Park ◽

Sung-Soo Lee ◽

...

Keyword(s):

Thin Films ◽

Real Time ◽

Gas Phase ◽

Vapor Deposition ◽

Chemical Vapor ◽

Hot Wire ◽

Silicon Thin Films

Ex situ spectroscopic ellipsometry investigation of the layered structure of polycrystalline diamond thin films grown by electron cyclotron resonance-assisted chemical vapor deposition

10.1063/1.1384487 ◽

2001 ◽

Vol 90 (3) ◽

pp. 1280-1285 ◽

Cited By ~ 11

Author(s):

S. Gupta ◽

B. R. Weiner ◽

G. Morell

Keyword(s):

Thin Films ◽

Layered Structure ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Polycrystalline Diamond ◽

Ex Situ

Spectroscopic ellipsometry studies on the optical constants of Bi4Ti3O12:xNa thin films grown by metal-organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2010.12.242 ◽

2011 ◽

Vol 519 (11) ◽

pp. 3782-3788 ◽

Cited By ~ 5

Author(s):

S. Bin Anooz ◽

J. Schwarzkopf ◽

R. Dirsyte ◽

E. Agócs ◽

P. Petrik ◽

...

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Optical Constants ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Real time spectroscopic ellipsometry characterization of the nucleation of diamond by filament‐assisted chemical vapor deposition

10.1063/1.350544 ◽

1992 ◽

Vol 71 (10) ◽

pp. 5287-5289 ◽

Cited By ~ 25

Author(s):

R. W. Collins ◽

Yue Cong ◽

H. V. Nguyen ◽

Ilsin An ◽

K. Vedam ◽

...

Keyword(s):

Real Time ◽

Vapor Deposition ◽

Chemical Vapor

In Situ Growth Monitoring During Metalorganic Chemical Vapor Deposition of YBa 2Cu 3Ox Thin Films by Spectroscopic Ellipsometry

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.l632 ◽

1999 ◽

Vol 38 (Part 2, No. 6A/B) ◽

pp. L632-L635 ◽

Cited By ~ 2

Author(s):

Shuu'ichirou Yamamoto ◽

Satoshi Sugai ◽

Yasunari Matsukawa ◽

Akio Sengoku ◽

Hiroshi Tobisaka ◽

...

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Growth Monitoring ◽

In Situ Growth ◽

Metalorganic Chemical

Anatomy of μc-Si thin films by plasma enhanced chemical vapor deposition: An investigation by spectroscopic ellipsometry

10.1063/1.1287129 ◽

2000 ◽

Vol 88 (5) ◽

pp. 2408-2414 ◽

Cited By ~ 38

Author(s):

M. Losurdo ◽

R. Rizzoli ◽

C. Summonte ◽

G. Cicala ◽

P. Capezzuto ◽

...

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Chemical Vapor

Spectroscopic ellipsometry studies on hydrogenated amorphous silicon thin films deposited using DC saddle field plasma enhanced chemical vapor deposition system

Thin Solid Films ◽

10.1016/j.tsf.2010.12.074 ◽

2011 ◽

Vol 519 (9) ◽

pp. 2863-2866 ◽

Cited By ~ 9

Author(s):

Jhantu Kumar Saha ◽

Barzin Bahardoust ◽

Keith Leong ◽

Adel B. Gougam ◽

Nazir P. Kherani ◽

...

Keyword(s):

Thin Films ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Hydrogenated Amorphous Silicon ◽

Chemical Vapor ◽

Silicon Thin Films ◽

Dc Saddle Field ◽

Hydrogenated Amorphous