Growth Mechanism of Silicon Deposited by Atmospheric Pressure Chemical Vapor Deposition on Different Ceramic Substrates
2000 ◽
Vol 147
(1)
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pp. 340
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2007 ◽
Vol 111
(29)
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pp. 10814-10817
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2013 ◽
Vol 117
(47)
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pp. 25175-25184
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1995 ◽
Vol 24
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pp. 761-766
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2020 ◽
Vol 67
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pp. 4245-4249
2017 ◽
Vol 27
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pp. 1606469
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