X‐Ray Photoelectron Spectroscopy Analyses of Oxide‐Masked Polycrystalline SiGe Features Etched in a High‐Density Plasma Source

A high strength recycled newspaper (NP)/high density polyethylene (HDPE) laminated composite was developed using NP laminas as reinforcement and HDPE film as matrix. Herein, NP fiber was modified with stearic acid (SA) to enhance the water resistance of the NP laminas and NP/HDPE composite. The effects of heat treatment and SA concentration on the water resistance and tensile property of NP and composite samples were investigated. The chemical structure of the NP was characterized with X-ray diffractometer, X-ray photoelectron spectroscopy and attenuated total reflectance Fourier transform infrared spectra techniques. The surface and microstructure of the NP sheets were observed by scanning electron microscopy. An expected high-water resistance of NP sheets was achieved due to a chemical bonding that low surface energy SA were grafted onto the modified NP fibers. Results showed that the hydrophobicity of NP increased with increasing the stearic acid concentration. The water resistance of the composite laminates was depended on the hydrophobicity of the NP sheets. The lowest value of 2 h water absorption rate (3.3% ± 0.3%) and thickness swelling rate (2.2% ± 0.4%) of composite were obtained when the SA concentration was 0.15 M. In addition, the introduction of SA can not only enhance the water resistance of the composite laminates, but also reduce the loss of tensile strength in wet conditions, which shows potential in outdoor applications.

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Si etching rate calculation for low pressure high density plasma source using Cl[sub 2] gas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1286197 ◽

2000 ◽

Vol 18 (5) ◽

pp. 2224 ◽

Cited By ~ 2

Author(s):

Young D. Lee ◽

H. Y. Chang ◽

C. S. Chang

Keyword(s):

Etching Rate ◽

Plasma Source ◽

Low Pressure ◽

High Density ◽

Rate Calculation ◽

Density Plasma

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A Guillemin type E pulse forming network as the driver for a pulsed, high density plasma source

Review of Scientific Instruments ◽

10.1063/1.4881681 ◽

2014 ◽

Vol 85 (6) ◽

pp. 063503 ◽

Cited By ~ 8

Author(s):

Priyavandna J. Rathod ◽

V. P. Anitha ◽

Z. H. Sholapurwala ◽

Y. C. Saxena

Keyword(s):

Plasma Source ◽

High Density ◽

Pulse Forming Network ◽

Density Plasma

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ChemInform Abstract: A Coordinated Study of the Passivation of Alloy Steels by Plasma Source Mass Spectrometry and X-Ray Photoelectron Spectroscopy. Part 2. Growth Kinetics of the Passive Film.

ChemInform ◽

10.1002/chin.198930022 ◽

1989 ◽

Vol 20 (30) ◽

Author(s):

J. E. CASTLE ◽

J. H. QIU

Keyword(s):

Mass Spectrometry ◽

Passive Film ◽

Growth Kinetics ◽

Photoelectron Spectroscopy ◽

Plasma Source ◽

X Ray ◽

Source Mass ◽

Alloy Steels ◽

Kinetics Of

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Effect of R.F. Power on Structures and Properties of Amorphous Fluorinated Carbon Films Prepared by PSII

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.353-358.1829 ◽

2007 ◽

Vol 353-358 ◽

pp. 1829-1832

Author(s):

Guang Ze Tang ◽

Xin Xin Ma ◽

Ming Ren Sun

Keyword(s):

Photoelectron Spectroscopy ◽

Cluster Structure ◽

Indentation Test ◽

Plasma Source ◽

Carbon Films ◽

Power Structures ◽

X Ray ◽

Structures And Properties ◽

Plasma Source Ion Implantation ◽

Structure Density

Fluorinated amorphous carbon films (a-C:H:F) were deposited by plasma source ion implantation (PSII) with precursor gas of CH2FCF3 + C2H2 + H2 with various radio frequency (r.f.) power. Structures and properties evolution varied with r.f. power was discussed in detail. X-ray photoelectron spectroscopy (XPS), Raman spectrum, X-Ray reflection(XRR), atomic force microscopy (AFM) were used to analyze composition, chemical state, sp2 cluster structure, density and surface morphology of prepared films. Nano-indentation test was used to get hardness and modulus. The results show that with the increase of r.f. power, the size and amount of sp2 cluster increase, so does the surface roughness; however, the density and the hardness of films decrease.

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