Ellipsometric Examination of Growth and Dissolution Rates of Ta2 O 5 Films Formed by Metalorganic Chemical Vapor Deposition
1992 ◽
Vol 139
(7)
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pp. 1956-1962
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1995 ◽
Vol 146
(1-4)
◽
pp. 482-488
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2006 ◽
Vol 290
(2)
◽
pp. 441-445
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