Boron-Doped Si[sub 0.8]Ge[sub 0.2] Thin Film Deposited by Helicon Sputtering for Microthermoelectric Hydrogen Sensor

2007 ◽  
Vol 154 (1) ◽  
pp. J53 ◽  
Author(s):  
Kazuki Tajima ◽  
Woosuck Shin ◽  
Lionel Fabrice Houlet ◽  
Toshio Itoh ◽  
Noriya Izu ◽  
...  
Keyword(s):  
Thin Film ◽  
Hydrogen Sensor ◽  
Boron Doped

B- and P-Doped Si0.8Ge0.2 Thin Film Deposited by Helicon Sputtering for the Micro-Thermoelectric Gas Sensor

2006 ◽  
Vol 320 ◽  
pp. 99-102 ◽  
Author(s):  
Kazuki Tajima ◽  
Woosuck Shin ◽  
Maiko Nishibori ◽  
Norimitsu Murayama ◽  
Toshio Itoh ◽  
...  
Keyword(s):  
Thin Film ◽  
Hydrogen Oxidation ◽  
Exothermic Reaction ◽  
High Sensitivity ◽  
Hydrogen Sensor ◽  
Thermoelectric Effect ◽  
Boron Doped ◽  
Reliable Monitoring ◽  
Ppm Level ◽  
Pt Catalyzed

Micro-thermoelectric hydrogen sensor (micro-THS) with the combination of the thermoelectric effect of Si0.8Ge0.2 thin film and the Pt-catalyzed exothermic reaction of hydrogen oxidation was prepared by microfabrication process. In the viewpoint of high sensitivity of micro-THS, the thermoelectric properties of the Si0.8Ge0.2 thin film could be improved by optimizing carrier concentration using helicon sputtering with an advantage of easy doping control, and sensitivity of the device with this thin film was investigated. As the result, the boron-doped Si0.8Ge0.2 thin film is considered to be the better choice ensuring the reliable monitoring of hydrogen concentration down to ppm level.

Reduction of Wind Disturbance by Optimizing the Drive Current of Pt Ultra-thin Film Hydrogen Sensor

2020 ◽  
Vol 140 (4) ◽  
pp. 92-96
Author(s):  
Yuto Goda ◽  
Hiroto Shobu ◽  
Kenji Sakai ◽  
Toshihiko Kiwa ◽  
Kenji Kondo ◽  
...  
Keyword(s):  
Thin Film ◽  
Hydrogen Sensor ◽  
Wind Disturbance ◽  
Drive Current ◽  
Ultra Thin Film

Optical fiber hydrogen sensor based on light reflection and a palladium-sliver thin film

2011 ◽  
Vol 7 (4) ◽  
pp. 249-252 ◽  
Author(s):  
Lu-jun Cui ◽  
Hui-chao Shang ◽  
Gang Zhang ◽  
Ze-xiang Zhao ◽  
Jun Zhou
Keyword(s):  
Thin Film ◽  
Optical Fiber ◽  
Hydrogen Sensor ◽  
Light Reflection

Platinum/palladium bimetallic ultra-thin film decorated on a one-dimensional ZnO nanorods array for use as fast response flexible hydrogen sensor

2016 ◽  
Vol 176 ◽  
pp. 232-236 ◽  
Author(s):  
Kamrul Hassan ◽  
A.S.M. Iftekhar Uddin ◽  
Farman Ullah ◽  
Yong Soo Kim ◽  
Gwiy-Sang Chung
Keyword(s):  
Thin Film ◽  
Zno Nanorods ◽  
Hydrogen Sensor ◽  
Fast Response ◽  
One Dimensional ◽  
Nanorods Array ◽  
Ultra Thin Film

Tailoring the Optical Parameters of Optical Fiber Interferometer With Dedicated Boron-Doped Nanocrystalline Diamond Thin Film

2017 ◽  
Vol 214 (11) ◽  
pp. 1700222 ◽  
Author(s):  
Daria Majchrowicz ◽  
Monika Kosowska ◽  
Przemysław Struk ◽  
Małgorzata Jędrzejewska-Szczerska
Keyword(s):  
Thin Film ◽  
Optical Fiber ◽  
Nanocrystalline Diamond ◽  
Optical Parameters ◽  
Diamond Thin Film ◽  
Boron Doped
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