In-situ FTIR Study of Atomic Layer Deposition (ALD) of Copper Metal Films

ECS Transactions ◽

10.1149/1.2779073 ◽

2019 ◽

Vol 11 (7) ◽

pp. 91-101 ◽

Author(s):

Min Dai ◽

Jinhee Kwon ◽

E. Langereis ◽

Leszek S. Wielunski ◽

Yves Chabal ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Metal Films ◽

In Situ Ftir ◽

Copper Metal ◽

Layer Deposition

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In-Situ FTIR Study of Copper Deposition by Atomic Layer Deposition

ECS Meeting Abstracts ◽

10.1149/ma2007-02/17/987 ◽

2007 ◽

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Copper Deposition ◽

In Situ Ftir ◽

Layer Deposition

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Atomic Layer Deposition of Ultrathin Copper Metal Films from a Liquid Copper(I) Amidinate Precursor

Journal of The Electrochemical Society ◽

10.1149/1.2338632 ◽

2006 ◽

Vol 153 (11) ◽

pp. C787 ◽

Author(s):

Zhengwen Li ◽

Antti Rahtu ◽

Roy G. Gordon

Keyword(s):

Atomic Layer Deposition ◽

Liquid Copper ◽

Atomic Layer ◽

Metal Films ◽

Copper Metal ◽

Layer Deposition

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In Situ FTIR Characterization of Growth Inhibition in Atomic Layer Deposition Using Reversible Surface Functionalization

ECS Transactions ◽

10.1149/05013.0043ecst ◽

2013 ◽

Vol 50 (13) ◽

pp. 43-51 ◽

Author(s):

A. Yanguas-Gil ◽

J. A. Libera ◽

J. W. Elam

Keyword(s):

Atomic Layer Deposition ◽

Growth Inhibition ◽

Surface Functionalization ◽

Atomic Layer ◽

In Situ Ftir ◽

Ftir Characterization ◽

Layer Deposition

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Mechanistic study of atomic layer deposition of AlxSiyO thin film via in-situ FTIR spectroscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4927318 ◽

2015 ◽

Vol 33 (5) ◽

pp. 05E130 ◽

Author(s):

Jea Cho ◽

Taeseung Kim ◽

Trevor Seegmiller ◽

Jane P. Chang

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Ftir Spectroscopy ◽

Atomic Layer ◽

Mechanistic Study ◽

In Situ Ftir ◽

In Situ Ftir Spectroscopy ◽

Layer Deposition

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In Situ FTIR Characterization of Growth Inhibition in Atomic Layer Deposition Using Reversible Surface Functionalization

ECS Meeting Abstracts ◽

10.1149/ma2012-02/28/2478 ◽

2012 ◽

Keyword(s):

Atomic Layer Deposition ◽

Growth Inhibition ◽

Surface Functionalization ◽

Atomic Layer ◽

In Situ Ftir ◽

Ftir Characterization ◽

Layer Deposition

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Estimating the Interrelation between the Rate of Atomic Layer Deposition of Thin Platinum-Group Metal Films and the Molecular Mass of Reactant Precursors

Russian Microelectronics ◽

10.1134/s1063739719040103 ◽

2019 ◽

Vol 48 (4) ◽

pp. 208-219

Author(s):

V. Yu. Vasilyev

Keyword(s):

Atomic Layer Deposition ◽

Molecular Mass ◽

Atomic Layer ◽

Platinum Group Metal ◽

Metal Films ◽

Group Metal ◽

Layer Deposition ◽

Platinum Group ◽

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SiO2 Atomic Layer Deposition Using Tris(dimethylamino)silane and Hydrogen Peroxide Studied by in Situ Transmission FTIR Spectroscopy

The Journal of Physical Chemistry C ◽

10.1021/jp806638e ◽

2009 ◽

Vol 113 (19) ◽

pp. 8249-8257 ◽

Author(s):

B. B. Burton ◽

S. W. Kang ◽

S. W. Rhee ◽

S. M. George

Keyword(s):

Hydrogen Peroxide ◽

Atomic Layer Deposition ◽

Ftir Spectroscopy ◽

Atomic Layer ◽

Layer Deposition

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Realization of high-quality HfO2 on In0.53Ga0.47As by in-situ atomic-layer-deposition

Applied Physics Letters ◽

10.1063/1.4706261 ◽

2012 ◽

Vol 100 (17) ◽

pp. 172110 ◽

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

High Quality ◽

Layer Deposition

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Atomic Layer Deposition and in-Situ Characterization of Yttrium Oxide and Yttria-Stabilized Zirconia

ECS Transactions ◽

10.1149/06907.0109ecst ◽

2015 ◽

Vol 69 (7) ◽

pp. 109-116

Author(s):

L. Lecordier

Keyword(s):

Atomic Layer Deposition ◽

Yttrium Oxide ◽

Atomic Layer ◽

Yttria Stabilized Zirconia ◽

Stabilized Zirconia ◽

In Situ Characterization ◽

Layer Deposition

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In Situ Synchrotron X-Ray Diffraction Analysis of Phase Transformation in Epitaxial Metastable hcp Nickel Thin Films, Prepared via Plasma-Enhanced Atomic Layer Deposition

Advanced Materials Interfaces ◽

10.1002/admi.201800957 ◽

2018 ◽

Vol 5 (24) ◽

pp. 1800957 ◽

Author(s):

Pouyan Motamedi ◽

Ken Bosnick ◽

Ken Cadien ◽

James D. Hogan

Keyword(s):

Phase Transformation ◽

Atomic Layer Deposition ◽

Diffraction Analysis ◽

Atomic Layer ◽

X Ray Diffraction ◽

X Ray ◽

Nickel Thin Films ◽

Layer Deposition

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