Mechanistic study of atomic layer deposition of AlxSiyO thin film via in-situ FTIR spectroscopy

2015 ◽  
Vol 33 (5) ◽  
pp. 05E130 ◽  
Author(s):  
Jea Cho ◽  
Taeseung Kim ◽  
Trevor Seegmiller ◽  
Jane P. Chang
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Ftir Spectroscopy ◽  
Atomic Layer ◽  
Mechanistic Study ◽  
In Situ Ftir ◽  
In Situ Ftir Spectroscopy ◽  
Layer Deposition

In-Situ Synchrotron X-Ray Scattering Study of Thin Film Growth by Atomic Layer Deposition

2011 ◽  
Vol 11 (2) ◽  
pp. 1577-1580 ◽  
Author(s):  
Yong Jun Park ◽  
Dong Ryeol Lee ◽  
Hyun Hwi Lee ◽  
Han-Bo-Ram Lee ◽  
Hyungjun Kim ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Film Growth ◽  
Atomic Layer ◽  
Thin Film Growth ◽  
X Ray ◽  
X Ray Scattering ◽  
Layer Deposition ◽  
Scattering Study

Characterization of HfO N thin film formation by in-situ plasma enhanced atomic layer deposition using NH3 and N2 plasmas

2015 ◽  
Vol 349 ◽  
pp. 757-762 ◽  
Author(s):  
Young Bok Lee ◽  
Il-Kwon Oh ◽  
Edward Namkyu Cho ◽  
Pyung Moon ◽  
Hyungjun Kim ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Film Formation ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Thin Film Formation

Resistive switching of in situ and ex situ oxygen plasma treated ZnO thin film deposited by atomic layer deposition

2014 ◽  
Vol 116 (2) ◽  
pp. 663-669 ◽  
Author(s):  
Jian Zhang ◽  
Hui Yang ◽  
Qilong Zhang ◽  
Hao Jiang ◽  
Jikui Luo ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Resistive Switching ◽  
Oxygen Plasma ◽  
Atomic Layer ◽  
Ex Situ ◽  
Zno Thin Film ◽  
Layer Deposition

In-situ FTIR Study of Atomic Layer Deposition (ALD) of Copper Metal Films

2019 ◽  
Vol 11 (7) ◽  
pp. 91-101 ◽  
Author(s):  
Min Dai ◽  
Jinhee Kwon ◽  
E. Langereis ◽  
Leszek S. Wielunski ◽  
Yves Chabal ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Metal Films ◽  
In Situ Ftir ◽  
Copper Metal ◽  
Ftir Study ◽  
Layer Deposition
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