Mechanistic study of atomic layer deposition of AlxSiyO thin film via in-situ FTIR spectroscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4927318 ◽

2015 ◽

Vol 33 (5) ◽

pp. 05E130 ◽

Author(s):

Jea Cho ◽

Taeseung Kim ◽

Trevor Seegmiller ◽

Jane P. Chang

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Ftir Spectroscopy ◽

Atomic Layer ◽

Mechanistic Study ◽

In Situ Ftir ◽

In Situ Ftir Spectroscopy ◽

Layer Deposition

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SiO2 Atomic Layer Deposition Using Tris(dimethylamino)silane and Hydrogen Peroxide Studied by in Situ Transmission FTIR Spectroscopy

The Journal of Physical Chemistry C ◽

10.1021/jp806638e ◽

2009 ◽

Vol 113 (19) ◽

pp. 8249-8257 ◽

Author(s):

B. B. Burton ◽

S. W. Kang ◽

S. W. Rhee ◽

S. M. George

Keyword(s):

Hydrogen Peroxide ◽

Atomic Layer Deposition ◽

Ftir Spectroscopy ◽

Atomic Layer ◽

Layer Deposition

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Development of a scanning probe microscopy integrated atomic layer deposition system for in situ successive monitoring of thin film growth

Review of Scientific Instruments ◽

10.1063/1.5042463 ◽

2018 ◽

Vol 89 (12) ◽

pp. 123702 ◽

Author(s):

Kun Cao ◽

Quan Hu ◽

Jiaming Cai ◽

Miao Gong ◽

Jianfeng Yang ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Scanning Probe Microscopy ◽

Film Growth ◽

Atomic Layer ◽

Thin Film Growth ◽

Scanning Probe ◽

Probe Microscopy ◽

Layer Deposition

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In situ infrared absorption spectroscopy for thin film growth by atomic layer deposition

10.1117/12.681331 ◽

2006 ◽

Author(s):

Yu Wang ◽

Min Dai ◽

Sandrine Rivillon ◽

Ming-Tsung Ho ◽

Yves J. Chabal

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Absorption Spectroscopy ◽

Infrared Absorption ◽

Film Growth ◽

Atomic Layer ◽

Thin Film Growth ◽

Infrared Absorption Spectroscopy ◽

Layer Deposition

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In-Situ Synchrotron X-Ray Scattering Study of Thin Film Growth by Atomic Layer Deposition

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2011.3399 ◽

2011 ◽

Vol 11 (2) ◽

pp. 1577-1580 ◽

Author(s):

Yong Jun Park ◽

Dong Ryeol Lee ◽

Hyun Hwi Lee ◽

Han-Bo-Ram Lee ◽

Hyungjun Kim ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Film Growth ◽

Atomic Layer ◽

Thin Film Growth ◽

X Ray ◽

X Ray Scattering ◽

Layer Deposition ◽

Scattering Study

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Molecular Layer Deposition of Nylon 66 Films Examined Using in Situ FTIR Spectroscopy

The Journal of Physical Chemistry C ◽

10.1021/jp067041n ◽

2007 ◽

Vol 111 (24) ◽

pp. 8509-8517 ◽

Author(s):

Y. Du ◽

S. M. George

Keyword(s):

Ftir Spectroscopy ◽

Molecular Layer ◽

In Situ Ftir ◽

Nylon 66 ◽

Molecular Layer Deposition ◽

In Situ Ftir Spectroscopy ◽

Layer Deposition

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Characterization of HfO N thin film formation by in-situ plasma enhanced atomic layer deposition using NH3 and N2 plasmas

Applied Surface Science ◽

10.1016/j.apsusc.2015.05.066 ◽

2015 ◽

Vol 349 ◽

pp. 757-762 ◽

Author(s):

Young Bok Lee ◽

Il-Kwon Oh ◽

Edward Namkyu Cho ◽

Pyung Moon ◽

Hyungjun Kim ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Film Formation ◽

Atomic Layer ◽

Layer Deposition ◽

Thin Film Formation

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Resistive switching of in situ and ex situ oxygen plasma treated ZnO thin film deposited by atomic layer deposition

Applied Physics A ◽

10.1007/s00339-014-8324-4 ◽

2014 ◽

Vol 116 (2) ◽

pp. 663-669 ◽

Author(s):

Jian Zhang ◽

Hui Yang ◽

Qilong Zhang ◽

Hao Jiang ◽

Jikui Luo ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Resistive Switching ◽

Oxygen Plasma ◽

Atomic Layer ◽

Ex Situ ◽

Zno Thin Film ◽

Layer Deposition

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In Situ FTIR Characterization of Growth Inhibition in Atomic Layer Deposition Using Reversible Surface Functionalization

ECS Transactions ◽

10.1149/05013.0043ecst ◽

2013 ◽

Vol 50 (13) ◽

pp. 43-51 ◽

Author(s):

A. Yanguas-Gil ◽

J. A. Libera ◽

J. W. Elam

Keyword(s):

Atomic Layer Deposition ◽

Growth Inhibition ◽

Surface Functionalization ◽

Atomic Layer ◽

In Situ Ftir ◽

Ftir Characterization ◽

Layer Deposition

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In-situ FTIR Study of Atomic Layer Deposition (ALD) of Copper Metal Films

ECS Transactions ◽

10.1149/1.2779073 ◽

2019 ◽

Vol 11 (7) ◽

pp. 91-101 ◽

Author(s):

Min Dai ◽

Jinhee Kwon ◽

E. Langereis ◽

Leszek S. Wielunski ◽

Yves Chabal ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Metal Films ◽

In Situ Ftir ◽

Copper Metal ◽

Layer Deposition

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In-Situ FTIR Study of Copper Deposition by Atomic Layer Deposition

ECS Meeting Abstracts ◽

10.1149/ma2007-02/17/987 ◽

2007 ◽

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Copper Deposition ◽

In Situ Ftir ◽

Layer Deposition

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