In Situ Monitoring and Real-Time Control of Gate Hardmask Etching in High-Volume Manufacturing of ICs

2008 ◽  
Vol 155 (11) ◽  
pp. D699 ◽  
Author(s):  
Lele Chen ◽  
Weinan Jiang ◽  
Todd Pao ◽  
Bill Lin ◽  
Linda Xu ◽  
...  
Keyword(s):  
Real Time ◽  
High Volume ◽  
In Situ Monitoring ◽  
Real Time Control ◽  
Time Control

scholarly journals Real-Time Control of a Catalytic Solid in a Fixed-Bed Reactor Based on In Situ Spectroscopy

2007 ◽  
Vol 46 (28) ◽  
pp. 5412-5416 ◽  
Author(s):  
Simona M. Bennici ◽  
Bas M. Vogelaar ◽  
T. Alexander Nijhuis ◽  
Bert M. Weckhuysen
Keyword(s):  
Real Time ◽  
Fixed Bed ◽  
Fixed Bed Reactor ◽  
In Situ Spectroscopy ◽  
Real Time Control ◽  
Time Control

IN-SITU NUTRIENT SENSORS FOR REAL-TIME CONTROL OF BIOLOGICAL NUTRIENT REMOVAL

2003 ◽  
Vol 2003 (9) ◽  
pp. 255-276
Author(s):  
Anders Lynggaard-Jensen ◽  
Ida Rasmussen ◽  
Niels H. Eisum ◽  
Jørgen Steen-Pedersen
Keyword(s):  
Real Time ◽  
Nutrient Removal ◽  
Biological Nutrient Removal ◽  
Real Time Control ◽  
Time Control

scholarly journals Real-Time Control of a Catalytic Solid in a Fixed-Bed Reactor Based on In Situ Spectroscopy

2007 ◽  
Vol 119 (28) ◽  
pp. 5508-5512 ◽  
Author(s):  
Simona M. Bennici ◽  
Bas M. Vogelaar ◽  
T. Alexander Nijhuis ◽  
Bert M. Weckhuysen
Keyword(s):  
Real Time ◽  
Fixed Bed ◽  
Fixed Bed Reactor ◽  
In Situ Spectroscopy ◽  
Real Time Control ◽  
Time Control

scholarly journals Open Source Software for the Real-Time Control, Processing, and Visualization of High-Volume Electrochemical Data

2019 ◽  
Vol 91 (19) ◽  
pp. 12321-12328 ◽  
Author(s):  
Samuel D. Curtis ◽  
Kyle L. Ploense ◽  
Martin Kurnik ◽  
Gabriel Ortega ◽  
Claudio Parolo ◽  
...  
Keyword(s):  
Open Source ◽  
Real Time ◽  
Open Source Software ◽  
High Volume ◽  
Real Time Control ◽  
The Real ◽  
Time Control

In situ X-ray fluorescence used for real-time control of CuInxGa1−xSe2 thin film composition

2002 ◽  
Vol 408 (1-2) ◽  
pp. 64-72 ◽  
Author(s):  
I.L. Eisgruber ◽  
B. Joshi ◽  
N. Gomez ◽  
J. Britt ◽  
T. Vincent
Keyword(s):  
Thin Film ◽  
Real Time ◽  
Real Time Control ◽  
Film Composition ◽  
X Ray ◽  
Time Control

scholarly journals In Situ Adaptive Tabulation for Real-Time Control

2005 ◽  
Vol 44 (8) ◽  
pp. 2716-2724 ◽  
Author(s):  
John D. Hedengren ◽  
Thomas F. Edgar
Keyword(s):  
Real Time ◽  
Real Time Control ◽  
Time Control ◽  
In Situ Adaptive Tabulation
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