Comparison of Diamond Deposition With Boron or Sulfur Addition

2019 ◽  
Vol 25 (8) ◽  
pp. 317-321
Author(s):  
Roland Haubner
Keyword(s):  
Diamond Deposition ◽  
Sulfur Addition

Diamond deposition with sulfur addition—thermodynamic calculations

2004 ◽  
Vol 13 (4-8) ◽  
pp. 648-655 ◽  
Author(s):  
R. Haubner
Keyword(s):  
Thermodynamic Calculations ◽  
Diamond Deposition ◽  
Sulfur Addition

Hot-filament diamond deposition with sulfur addition

2003 ◽  
Vol 12 (3-7) ◽  
pp. 298-305 ◽  
Author(s):  
R. Haubner ◽  
D. Sommer
Keyword(s):  
Diamond Deposition ◽  
Sulfur Addition ◽  
Hot Filament

Ground State and Excited State H-Atom Temperatures in a Microwave Plasma Diamond Deposition Reactor

1996 ◽  
Vol 6 (9) ◽  
pp. 1167-1180 ◽  
Author(s):  
A. Gicquel ◽  
M. Chenevier ◽  
Y. Breton ◽  
M. Petiau ◽  
J. P. Booth ◽  
...  
Keyword(s):  
Excited State ◽  
Ground State ◽  
Microwave Plasma ◽  
Diamond Deposition

scholarly journals Deposition of Boron-Doped Thin CVD Diamond Films from Methane-Triethyl Borate-Hydrogen Gas Mixture

Processes ◽  
2020 ◽  
Vol 8 (6) ◽  
pp. 666 ◽  
Author(s):  
Nikolay Ivanovich Polushin ◽  
Alexander Ivanovich Laptev ◽  
Boris Vladimirovich Spitsyn ◽  
Alexander Evgenievich Alexenko ◽  
Alexander Mihailovich Polyansky ◽  
...  
Keyword(s):  
Film Growth ◽  
Chemical Vapor ◽  
Hydrogen Gas ◽  
Diamond Growth ◽  
Structural Defects ◽  
Boron Doped Diamond ◽  
Diamond Deposition ◽  
Synthesis Conditions ◽  
Surface Etching ◽  
Boron Doped

Boron-doped diamond is a promising semiconductor material that can be used as a sensor and in power electronics. Currently, researchers have obtained thin boron-doped diamond layers due to low film growth rates (2–10 μm/h), with polycrystalline diamond growth on the front and edge planes of thicker crystals, inhomogeneous properties in the growing crystal’s volume, and the presence of different structural defects. One way to reduce structural imperfection is the specification of optimal synthesis conditions, as well as surface etching, to remove diamond polycrystals. Etching can be carried out using various gas compositions, but this operation is conducted with the interruption of the diamond deposition process; therefore, inhomogeneity in the diamond structure appears. The solution to this problem is etching in the process of diamond deposition. To realize this in the present work, we used triethyl borate as a boron-containing substance in the process of boron-doped diamond chemical vapor deposition. Due to the oxygen atoms in the triethyl borate molecule, it became possible to carry out an experiment on simultaneous boron-doped diamond deposition and growing surface etching without the requirement of process interruption for other operations. As a result of the experiments, we obtain highly boron-doped monocrystalline diamond layers with a thickness of about 8 μm and a boron content of 2.9%. Defects in the form of diamond polycrystals were not detected on the surface and around the periphery of the plate.

Hydrogen embrittlement of titanium during microwave plasma assisted CVD diamond deposition

2000 ◽  
Vol 16 (4) ◽  
pp. 355-360 ◽  
Author(s):  
Y. Fu ◽  
B. Yan ◽  
N.L. Loh ◽  
C.Q. Sun ◽  
P. Hing
Keyword(s):  
Hydrogen Embrittlement ◽  
Microwave Plasma ◽  
Cvd Diamond ◽  
Diamond Deposition

Optical diagnostics of microwave plasma in process of micro/nanocrystalline diamond deposition on hard alloy tools

2020 ◽  
Author(s):  
V.Y. Yurov ◽  
E.E. Ashkinazi ◽  
E.V. Zavedeev ◽  
A.K. Martyanov ◽  
I.A. Antonova ◽  
...  
Keyword(s):  
Hard Alloy ◽  
Microwave Plasma ◽  
Optical Diagnostics ◽  
Nanocrystalline Diamond ◽  
Diamond Deposition

Control of substrate temperature during diamond deposition

1995 ◽  
Vol 16 (S1) ◽  
pp. S157-S168 ◽  
Author(s):  
M. T. Bieberich ◽  
S. L. Girshick
Keyword(s):  
Substrate Temperature ◽  
Diamond Deposition

Systematic investigation of plasma emission spectra during microwave diamond deposition from CH4CO2 and C2H2CO2 gas mixtures

1993 ◽  
Vol 2 (2-4) ◽  
pp. 389-392 ◽  
Author(s):  
G. Balestrino ◽  
M. Marinelli ◽  
E. Milani ◽  
A. Paoletti ◽  
P. Paroli ◽  
...  
Keyword(s):  
Emission Spectra ◽  
Gas Mixtures ◽  
Systematic Investigation ◽  
Plasma Emission ◽  
Diamond Deposition ◽  
Co2 Gas

Investigation of surface preparation for diamond deposition on molybdenum substrates by secondary ion mass spectrometry

1993 ◽  
Vol 2 (5-7) ◽  
pp. 958-962 ◽  
Author(s):  
R. Steiner ◽  
G. Stingeder ◽  
M. Grasserbauer ◽  
R. Haubner ◽  
B. Lux
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Surface Preparation ◽  
Diamond Deposition ◽  
Ion Mass Spectrometry ◽  
Secondary Ion
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