Comparative Study on the Step Coverage Quality of Cu Film by SCFD and CVD

2019 ◽  
Vol 25 (8) ◽  
pp. 1199-1206
Author(s):  
Yukihiro Shimogaki ◽  
Takeshi Momose ◽  
Masakazu Sugiyama

1993 ◽  
Vol 140 (10) ◽  
pp. 2952-2959 ◽  
Author(s):  
Tetsuji Sorita ◽  
Satoru Shiga ◽  
Kazuyuki Ikuta ◽  
Yasuyuki Egashira ◽  
Hiroshi Komiyama


2010 ◽  
Vol 49 (5) ◽  
pp. 05FF01 ◽  
Author(s):  
Takeshi Momose ◽  
Masakazu Sugiyama ◽  
Eiichi Kondoh ◽  
Yukihiro Shimogaki


2012 ◽  
Vol 2 (12) ◽  
pp. 82-84
Author(s):  
Mariana Florica BEI ◽  
◽  
Helena Maria Sabo




Sign in / Sign up

Export Citation Format

Share Document