Comparative Study on the Step Coverage Quality of Cu Film by SCFD and CVD

2019 ◽  
Vol 25 (8) ◽  
pp. 1199-1206
Author(s):  
Yukihiro Shimogaki ◽  
Takeshi Momose ◽  
Masakazu Sugiyama

1993 ◽  
Vol 140 (10) ◽  
pp. 2952-2959 ◽  
Author(s):  
Tetsuji Sorita ◽  
Satoru Shiga ◽  
Kazuyuki Ikuta ◽  
Yasuyuki Egashira ◽  
Hiroshi Komiyama

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