Publisher's Note: Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N[sub 2]O Gas [Electrochem. Solid-State Lett., 13, G13 (2010)]

2010 ◽  
Vol 13 (4) ◽  
pp. S3
Author(s):  
Seok-Jun Won ◽  
Sungin Suh ◽  
Sang Woon Lee ◽  
Gyu-Jin Choi ◽  
Cheol Seong Hwang ◽  
...  
Keyword(s):  
Growth Rate ◽  
Solid State ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Dependent Growth

Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N[sub 2]O Gas

2010 ◽  
Vol 13 (2) ◽  
pp. G13 ◽  
Author(s):  
Seok-Jun Won ◽  
Sungin Suh ◽  
Sang Woon Lee ◽  
Gyu-Jin Choi ◽  
Cheol Seong Hwang ◽  
...  
Keyword(s):  
Growth Rate ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Dependent Growth

Retention of Surface Structure Causes Lower Density in Atomic Layer Deposition of Amorphous Titanium Oxide Thin Films

2021 ◽  
Author(s):  
Benjamin Rich ◽  
Yael Etinger-Geller ◽  
G. Ciatto ◽  
A Katsman ◽  
Boaz Pokroy
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Surface Structure ◽  
Titanium Oxide ◽  
Size Effects ◽  
Atomic Layer ◽  
Tio2 Films ◽  
Structural Modifications ◽  
Layer Deposition ◽  
Amorphous Tio2

Size effects and structural modifications in amorphous TiO2 films deposited by atomic layer deposition (ALD) were investigated. As with the previously investigated ALD-deposited Al2O3 system we found that the film’s...

scholarly journals Nanoscale Solid State Batteries Enabled by Thermal Atomic Layer Deposition of a Lithium Polyphosphazene Solid State Electrolyte

2017 ◽  
Vol 29 (8) ◽  
pp. 3740-3753 ◽  
Author(s):  
Alexander J. Pearse ◽  
Thomas E. Schmitt ◽  
Elliot J. Fuller ◽  
Farid El-Gabaly ◽  
Chuan-Fu Lin ◽  
...  
Keyword(s):  
Solid State ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Solid State Electrolyte ◽  
Layer Deposition ◽  
Solid State Batteries

Effects of Chlorine in Titanium Oxide on Palladium Atomic Layer Deposition

2014 ◽  
Vol 118 (39) ◽  
pp. 22611-22619 ◽  
Author(s):  
Yu Lei ◽  
Bin Liu ◽  
Junling Lu ◽  
Joseph A. Libera ◽  
Jeffrey P. Greeley ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Layer Deposition

Impact of the atomic layer deposition precursors diffusion on solid-state carbon nanotube based supercapacitors performances

2015 ◽  
Vol 26 (6) ◽  
pp. 064002 ◽  
Author(s):  
Giuseppe Fiorentino ◽  
Sten Vollebregt ◽  
F D Tichelaar ◽  
Ryoichi Ishihara ◽  
Pasqualina M Sarro
Keyword(s):  
Carbon Nanotube ◽  
Solid State ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Tin Oxynitride Anodes by Atomic Layer Deposition for Solid-State Batteries

2018 ◽  
Vol 30 (8) ◽  
pp. 2526-2534 ◽  
Author(s):  
David M. Stewart ◽  
Alexander J. Pearse ◽  
Nam S. Kim ◽  
Elliot J. Fuller ◽  
A. Alec Talin ◽  
...  
Keyword(s):  
Solid State ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Solid State Batteries

scholarly journals Nucleation and Initial Stages of Growth during the Atomic Layer Deposition of Titanium Oxide on Mesoporous Silica

Nano Letters ◽  
2020 ◽  
Vol 20 (9) ◽  
pp. 6884-6890
Author(s):  
Wang Ke ◽  
Yang Liu ◽  
Xuelong Wang ◽  
Xiangdong Qin ◽  
Limei Chen ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Mesoporous Silica ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Stages Of Growth ◽  
Layer Deposition

High Growth Rate SiO2 by Atomic Layer Deposition

2019 ◽  
Vol 13 (1) ◽  
pp. 453-457 ◽  
Author(s):  
Raija Matero ◽  
Suvi Haukka ◽  
Marko Tuominen
Keyword(s):  
Growth Rate ◽  
Atomic Layer Deposition ◽  
High Growth ◽  
Atomic Layer ◽  
High Growth Rate ◽  
Layer Deposition
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