Modeling of Advanced FinFET Dummy Gate Corner Residue Impacted By Clogging
Keyword(s):
2012 ◽
Vol 195
◽
pp. 42-45
◽
Keyword(s):
Keyword(s):
2012 ◽
Vol 60
(5)
◽
pp. 842-848
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Keyword(s):
2008 ◽
Vol 55
(12)
◽
pp. 3555-3561
◽
2003 ◽
Vol 42
(Part 2, No. 11B)
◽
pp. L1366-L1368