Interfacial Chemical and Mechanical Reactions between Tungsten-Film and Nano-Scale Colloidal Zirconia Abrasives for Chemical-Mechanical-Planarization

ECS Journal of Solid State Science and Technology ◽

10.1149/2162-8777/ab915c ◽

2020 ◽

Vol 9 (5) ◽

pp. 054001

Author(s):

Eun-Bin Seo ◽

Jae-Young Bae ◽

Sung-In Kim ◽

Han-Eol Choi ◽

Young-Hye Son ◽

...

Keyword(s):

Chemical Mechanical Planarization ◽

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(Invited) Controlling Nano-Scale Chemically Modified Thin Films for Chemical Mechanical Planarization

ECS Meeting Abstracts ◽

10.1149/ma2021-0120828mtgabs ◽

2021 ◽

Vol MA2021-01 (20) ◽

pp. 828-828

Author(s):

Gul Bahar Basim

Keyword(s):

Chemical Mechanical Planarization ◽

Chemically Modified ◽

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Material Removal Mechanism during Copper Chemical Mechanical Planarization Based on Nano-Scale Material Behavior

ECS Journal of Solid State Science and Technology ◽

10.1149/2.0071705jss ◽

2017 ◽

Vol 6 (5) ◽

pp. P235-P242 ◽

Author(s):

Seungchoun Choi ◽

Fiona M. Doyle ◽

David A. Dornfeld

Keyword(s):

Material Removal ◽

Chemical Mechanical Planarization ◽

Material Behavior ◽

Removal Mechanism ◽

Material Removal Mechanism ◽

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Highly Selective Polishing Rate Between a Tungsten Film and a Silicon-Dioxide Film by Using a Malic-Acid Selectivity Agent in Tungsten-Film Chemical-Mechanical Planarization

Journal of the Korean Physical Society ◽

10.3938/jkps.76.1127 ◽

2020 ◽

Vol 76 (12) ◽

pp. 1127-1132

Author(s):

Eun-Bin Seo ◽

Jea-Gun Park ◽

Jae-Young Bae ◽

Jin-Hyung Park

Keyword(s):

Silicon Dioxide ◽

Chemical Mechanical Planarization ◽

Silicon Dioxide Film ◽

Tungsten Film ◽

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Characterization of Nano-Scale Protective Oxide Films: Application on Metal Chemical Mechanical Planarization

ECS Journal of Solid State Science and Technology ◽

10.1149/2.0151412jss ◽

2014 ◽

Vol 4 (2) ◽

pp. P1-P8 ◽

Author(s):

Ayse Karagoz ◽

Valentin Craciun ◽

G. Bahar Basim

Keyword(s):

Chemical Mechanical Planarization ◽

Oxide Films ◽

Protective Oxide ◽

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Influence of Scavenger on Abrasive Stability Enhancement and Chemical and Mechanical Properties for Tungsten-Film Chemical- Mechanical-Planarization

ECS Journal of Solid State Science and Technology ◽

10.1149/2162-8777/ab9fe5 ◽

2020 ◽

Vol 9 (6) ◽

pp. 065001

Author(s):

Eun-Bin Seo ◽

Jae-Young Bae ◽

Sung-In Kim ◽

Han-Eol Choi ◽

Pilsu Kim ◽

...

Keyword(s):

Mechanical Properties ◽

Chemical Mechanical Planarization ◽

Tungsten Film ◽

Stability Enhancement

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Chemical-Mechanical Planarization of Semiconductor Materials

10.1007/978-3-662-06234-0 ◽

2004 ◽

Keyword(s):

Chemical Mechanical Planarization ◽

Semiconductor Materials

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Morphology and Differentiation of Human Mesenchymal Stem Cells Cultured on a Nano-Scale Structured Substrate

IEEJ Transactions on Electronics Information and Systems ◽

10.1541/ieejeiss.140.432 ◽

2020 ◽

Vol 140 (4) ◽

pp. 432-436

Author(s):

Masashi Yamazaki ◽

Hiroki Kojima ◽

Hiromi Miyoshi

Keyword(s):

Mesenchymal Stem Cells ◽

Human Mesenchymal Stem Cells ◽

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MEASUREMENT OF ICE ADHESION FORCE ON NANO SCALE BY SCANNING PROBE MICROSCOPE (INFLUENCES OF SURFACE TEMPERATURE AND SURFACTANT ON ICE ADHESION FORCE TO COPPER)

10.1615/ihtc16.mmp.022416 ◽

2018 ◽

Author(s):

Junki Sakamoto ◽

Koji Matsumoto ◽

K. Ehara ◽

J. Ueda

Keyword(s):

Surface Temperature ◽

Adhesion Force ◽

Scanning Probe Microscope ◽

Scanning Probe ◽

Probe Microscope ◽

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TOWARDS NANO-SCALE THERMOPHOTOVOLTAIC APPLICATIONS: DISCUSSIONS FOR MATERIAL SELECTION AND MEASURING SYSTEM

Proceeding of Proceedings of the 8th International Symposium on Radiative Transfer, RAD-16 June 6-10,2016, Cappadocia, Turkey ◽

10.1615/rad-16.110 ◽

2016 ◽

Author(s):

Tuba Okutucu-Ozyurt ◽

Elif Begum Elcioglu ◽

Reha Denker ◽

Azadeh Didari ◽

M. Pinar Menguc

Keyword(s):

Material Selection ◽

Measuring System ◽

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OPTICAL PROPERTIES OF Cd0.55Mn0.45Te FILMS WITH NANO-SCALE SURFACE FORMATIONS

Telecommunications and Radio Engineering ◽

10.1615/telecomradeng.v76.i10.30 ◽

2017 ◽

Vol 76 (10) ◽

pp. 865-871

Author(s):

V. P. Makhniy ◽

P. P. Horley ◽

A. M. Slyotov

Keyword(s):

Optical Properties ◽

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