Carboxylic Acids as Oxygen Supplying Agents for Atomic Layer Deposition of High-k Thin Films

ECS Meeting Abstracts ◽

10.1149/ma2008-02/24/1918 ◽

2008 ◽

Keyword(s):

Atomic Layer Deposition ◽

Carboxylic Acids ◽

Atomic Layer ◽

Layer Deposition ◽

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Carboxylic Acids as Oxygen Supplying Agents for Atomic Layer Deposition of High-k Thin Films

ECS Transactions ◽

10.1149/1.2980003 ◽

2019 ◽

Vol 16 (4) ◽

pp. 279-289

Author(s):

Erwan Rauwel ◽

Frédérique Ducroquet ◽

Protima Rauwel ◽

Marc-Georg Willinger ◽

Igor Matko ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Carboxylic Acids ◽

Atomic Layer ◽

Layer Deposition ◽

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High-k ZrO2 dielectric thin films on GaAs semiconductor with reduced regrowth of native oxides by atomic layer deposition

Chemical Physics Letters ◽

10.1016/j.cplett.2013.08.012 ◽

2013 ◽

Vol 583 ◽

pp. 74-79 ◽

Author(s):

R.B. Konda ◽

C. White ◽

J. Smak ◽

R. Mundle ◽

M. Bahoura ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Dielectric Thin Films ◽

Native Oxides ◽

Layer Deposition ◽

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Thermodynamics and kinetic behaviors of thickness-dependent crystallization in high-k thin films deposited by atomic layer deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4903946 ◽

2015 ◽

Vol 33 (1) ◽

pp. 01A140 ◽

Author(s):

Xianglong Nie ◽

Fei Ma ◽

Dayan Ma ◽

Kewei Xu

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

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Liquid Injection Atomic Layer Deposition of Metallic Ru Thin Films from Ru(tmhd)3 and of High-k TiO2 Thin Films from Ti(O-i-Pr)2(tmhd)2

ECS Meeting Abstracts ◽

10.1149/ma2009-02/23/2039 ◽

2009 ◽

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Tio2 Thin Films ◽

Layer Deposition ◽

High K ◽

Liquid Injection

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Effect of annealing and electrical properties of high-κ thin films grown by atomic layer deposition using carboxylic acids as oxygen source

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.3058743 ◽

2009 ◽

Vol 27 (1) ◽

pp. 230 ◽

Author(s):

E. Rauwel ◽

F. Ducroquet ◽

P. Rauwel ◽

M.-G. Willinger ◽

I. Matko ◽

...

Keyword(s):

Electrical Properties ◽

Atomic Layer Deposition ◽

Carboxylic Acids ◽

Atomic Layer ◽

Layer Deposition

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High-k Thin Films by Atomic Layer Deposition for Energy and Information Storage

Journal of the Korean Society for Precision Engineering ◽

10.7736/kspe.2018.35.12.1131 ◽

2018 ◽

Vol 35 (12) ◽

pp. 1131-1136

Author(s):

Jihwan An

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Information Storage ◽

Layer Deposition ◽

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A Comparison of O3 and H2O as Oxygen Sources for Atomic Layer Deposition Processing of HfAlOx Thin Films for High-k Dielectric Nanocapacitor Applications

ECS Meeting Abstracts ◽

10.1149/ma2010-01/18/978 ◽

2010 ◽

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

High K ◽

High K Dielectric

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Characterization and electrical properties of high-k GdScO3 thin films grown by atomic layer deposition

Applied Physics A ◽

10.1007/s00339-007-4069-7 ◽

2007 ◽

Vol 88 (4) ◽

pp. 633-637 ◽

Author(s):

P. Myllymäki ◽

M. Roeckerath ◽

M. Putkonen ◽

S. Lenk ◽

J. Schubert ◽

...

Keyword(s):

Electrical Properties ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

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A Comparison of O3 and H2O as Oxygen Sources for Atomic Layer Deposition Processing of HfAlOx Thin Films for High-k Dielectric Nanocapacitor Applications

ECS Transactions ◽

10.1149/1.3372567 ◽

2019 ◽

Vol 28 (2) ◽

pp. 97-108 ◽

Author(s):

Richard Phillips ◽

Eric Eisenbraun

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

High K ◽

High K Dielectric

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Structural and electrical properties of Ge-doped ZrO2 thin films grown by atomic layer deposition for high-k dielectrics

Journal of Materials Science ◽

10.1007/s10853-018-2695-4 ◽

2018 ◽

Vol 53 (21) ◽

pp. 15237-15245 ◽

Author(s):

Bo-Eun Park ◽

Yujin Lee ◽

Il-Kwon Oh ◽

Wontae Noh ◽

Satoko Gatineau ◽

...

Keyword(s):

Electrical Properties ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

High K ◽

Structural And Electrical Properties

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