Characterization and electrical properties of high-k GdScO3 thin films grown by atomic layer deposition
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2018 ◽
Vol 53
(21)
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pp. 15237-15245
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2015 ◽
Vol 33
(1)
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pp. 01A140
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Enhanced Electrical Properties of SrTiO3 Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
2011 ◽
Vol 14
(10)
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pp. G45
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2018 ◽
Vol 35
(12)
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pp. 1131-1136
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