The Effects of Fabrication Process on the Performance of a CMOS Based Capacitive Humidity Sensor

ECS Meeting Abstracts ◽

10.1149/ma2011-01/45/2064 ◽

2011 ◽

Keyword(s):

Humidity Sensor ◽

Fabrication Process ◽

Capacitive Humidity Sensor

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The Effects of Fabrication Process on the Performance of a CMOS Based Capacitive Humidity Sensor

ECS Transactions ◽

10.1149/1.3653925 ◽

2019 ◽

Vol 35 (30) ◽

pp. 71-78 ◽

Author(s):

Nooshin Saeidi ◽

Alan Blake ◽

Cindy Colinge ◽

M. Burke ◽

A. J. Quinn ◽

...

Keyword(s):

Humidity Sensor ◽

Fabrication Process ◽

Capacitive Humidity Sensor

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A high-and-rapid-response capacitive humidity sensor of nanoporous anodic alumina by one-step anodizing commercial 1050 aluminum alloy and its enhancement mechanism

Sensors and Actuators B Chemical ◽

10.1016/j.snb.2021.130156 ◽

2021 ◽

pp. 130156

Author(s):

C.K. Chung ◽

C.A. Ku ◽

Z.E. Wu

Keyword(s):

Aluminum Alloy ◽

Humidity Sensor ◽

Anodic Alumina ◽

Rapid Response ◽

Enhancement Mechanism ◽

Nanoporous Anodic Alumina ◽

One Step ◽

1050 Aluminum Alloy ◽

Capacitive Humidity Sensor

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Fully inkjet-printed BaTiO3 capacitive humidity sensor: microstructural engineering of the humidity sensing layer using bimodal ink

Ceramics International ◽

10.1016/j.ceramint.2021.05.191 ◽

2021 ◽

Author(s):

Frances Danielle M. Fernandez ◽

Murali Bissannagari ◽

Jihoon Kim

Keyword(s):

Humidity Sensor ◽

Humidity Sensing ◽

Capacitive Humidity Sensor

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Nano particle porous alumina based thin film parallel plate capacitive humidity sensor

10.1063/1.4872672 ◽

2014 ◽

Author(s):

Shailesh Kumar

Keyword(s):

Thin Film ◽

Parallel Plate ◽

Humidity Sensor ◽

Porous Alumina ◽

Nano Particle ◽

Capacitive Humidity Sensor

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Development of an Innovative Micro Capacitive Humidity Sensor With Double Polyimide Films and Interlacing Out-of-plane Electrodes Structure

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems ◽

10.1109/nems.2007.352125 ◽

2007 ◽

Author(s):

I-Yu Huang ◽

Yao-Yu Lee ◽

Chang-Yu Lin

Keyword(s):

Humidity Sensor ◽

Polyimide Films ◽

Out Of Plane ◽

Capacitive Humidity Sensor

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Fabrication of Nanostructured Metal Oxide Thin Film Capacitive Humidity Sensor

Metal and Metal Oxides for Energy and Electronics - Environmental Chemistry for a Sustainable World ◽

10.1007/978-3-030-53065-5_10 ◽

2020 ◽

pp. 355-374

Author(s):

Anwar Ulla Khan ◽

Lokesh Kumar ◽

Tarikul Islam ◽

Mohammad Ehtisham Khan

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Humidity Sensor ◽

Oxide Thin Film ◽

Metal Oxide Thin Film ◽

Nanostructured Metal ◽

Capacitive Humidity Sensor

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Capacitive humidity sensor using a polyimide sensing film

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. ◽

10.1109/dtip.2003.1287041 ◽

2004 ◽

Author(s):

J. Laconte ◽

V. Wilmart ◽

J.-P. Raskin ◽

D. Flandre

Keyword(s):

Humidity Sensor ◽

Capacitive Humidity Sensor

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Capacitive humidity sensor in CMOS technology

10.1117/12.444724 ◽

2001 ◽

Author(s):

Xian-Wei Yan ◽

Ming Qin ◽

Qing-An Huang

Keyword(s):

Humidity Sensor ◽

Cmos Technology ◽

Capacitive Humidity Sensor

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High-performance capacitive humidity sensor based on silicon nanoporous pillar array

Thin Solid Films ◽

10.1016/j.tsf.2008.07.016 ◽

2008 ◽

Vol 517 (2) ◽

pp. 948-951 ◽

Author(s):

Long Yu Li ◽

Yong Fen Dong ◽

Wei Fen Jiang ◽

Hui Fang Ji ◽

Xin Jian Li

Keyword(s):

High Performance ◽

Humidity Sensor ◽

Pillar Array ◽

Capacitive Humidity Sensor

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Capacitive Humidity Sensor Tag Monitoring System Using the Capacitive to Voltage Converter (CVC)

Communications in Computer and Information Science - Advanced Computer Science and Information Technology ◽

10.1007/978-3-642-24267-0_22 ◽

2011 ◽

pp. 181-189

Author(s):

Chang Won Lee ◽

Seung Joon Lee ◽

Minchul Kim ◽

Yeosun Kyung ◽

Kihwan Eom

Keyword(s):

Monitoring System ◽

Humidity Sensor ◽

Voltage Converter ◽

Capacitive Humidity Sensor

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