Copper Oxide Thin Films for Sub-Ppm Acetone Detection Obtained By Glancing Angle Magnetron Sputtering Deposition

ECS Meeting Abstracts ◽

10.1149/ma2021-01621642mtgabs ◽

2021 ◽

Vol MA2021-01 (62) ◽

pp. 1642-1642

Author(s):

Artur Rydosz

Keyword(s):

Magnetron Sputtering ◽

Copper Oxide ◽

Oxide Thin Films ◽

Sputtering Deposition ◽

Glancing Angle ◽

Acetone Detection

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Copper Oxide Thin Films for Sub-Ppm Acetone Detection Obtained By Glancing Angle Magnetron Sputtering Deposition

ECS Meeting Abstracts ◽

10.1149/ma2020-01342398mtgabs ◽

2020 ◽

Vol MA2020-01 (34) ◽

pp. 2398-2398

Author(s):

Artur Maciej Rydosz

Keyword(s):

Magnetron Sputtering ◽

Copper Oxide ◽

Oxide Thin Films ◽

Sputtering Deposition ◽

Glancing Angle ◽

Acetone Detection

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Interface Stress of Oxide Thin Films Produced by DC Pulse Magnetron Sputtering Deposition

Optical Interference Coatings ◽

10.1364/oic.2010.wd7 ◽

2010 ◽

Author(s):

Kun-Hsien Lee ◽

Chia-Chen Lee ◽

Chien-Jen Tang ◽

Cheng-Chung Jaing ◽

His-Chao Chen ◽

...

Keyword(s):

Magnetron Sputtering ◽

Interface Stress ◽

Oxide Thin Films ◽

Sputtering Deposition ◽

Pulse Magnetron

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Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates

Materials Letters ◽

10.1016/j.matlet.2013.05.063 ◽

2013 ◽

Vol 106 ◽

pp. 363-365 ◽

Author(s):

Ke Zhu ◽

Ye Yang ◽

Tiefeng Wei ◽

Ruiqin Tan ◽

Ping Cui ◽

...

Keyword(s):

Magnetron Sputtering ◽

Polyethylene Terephthalate ◽

Room Temperature ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Sputtering Deposition ◽

Aluminum Doped Zinc Oxide

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An investigation of the surface energy and optical transmittance of copper oxide thin films prepared by reactive magnetron sputtering

Acta Materialia ◽

10.1016/j.actamat.2005.07.035 ◽

2005 ◽

Vol 53 (19) ◽

pp. 5151-5159 ◽

Author(s):

A.A. Ogwu ◽

E. Bouquerel ◽

O. Ademosu ◽

S. Moh ◽

E. Crossan ◽

...

Keyword(s):

Surface Energy ◽

Magnetron Sputtering ◽

Copper Oxide ◽

Optical Transmittance ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Oxide Thin Films

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Physical properties of copper oxide thin films prepared by dc reactive magnetron sputtering under different oxygen partial pressures

Physica B Condensed Matter ◽

10.1016/j.physb.2009.08.185 ◽

2009 ◽

Vol 404 (23-24) ◽

pp. 4831-4834 ◽

Author(s):

Chun-Lung Chu ◽

Hsin-Chun Lu ◽

Chen-Yang Lo ◽

Chi-You Lai ◽

Yu-Hsiang Wang

Keyword(s):

Magnetron Sputtering ◽

Physical Properties ◽

Copper Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Oxide Thin Films ◽

Partial Pressures ◽

Dc Reactive Magnetron Sputtering

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Study of hafnium oxide thin films deposited by RF magnetron sputtering under glancing angle deposition at varying target to substrate distance

Applied Surface Science ◽

10.1016/j.apsusc.2015.06.077 ◽

2015 ◽

Vol 353 ◽

pp. 459-468 ◽

Author(s):

S. Maidul Haque ◽

K. Divakar Rao ◽

J.S. Misal ◽

R.B. Tokas ◽

D.D. Shinde ◽

...

Keyword(s):

Magnetron Sputtering ◽

Hafnium Oxide ◽

Rf Magnetron Sputtering ◽

Glancing Angle Deposition ◽

Oxide Thin Films ◽

Substrate Distance ◽

Glancing Angle ◽

Angle Deposition

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Experimental and theoretical studies of the DC reactive magnetron sputtering deposition of silver oxide thin films

Surface and Coatings Technology ◽

10.1016/s0257-8972(03)00682-0 ◽

2003 ◽

Vol 174-175 ◽

pp. 1282-1286 ◽

Author(s):

R. Snyders ◽

M. Wautelet ◽

R. Gouttebaron ◽

J.P. Dauchot ◽

M. Hecq

Keyword(s):

Magnetron Sputtering ◽

Silver Oxide ◽

Reactive Magnetron Sputtering ◽

Theoretical Studies ◽

Reactive Magnetron ◽

Oxide Thin Films ◽

Sputtering Deposition ◽

Dc Reactive Magnetron Sputtering ◽

Experimental And Theoretical Studies

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An extended Derjaguin-Landau-Verwey-Overbeek theory approach to determining the surface energy of copper oxide thin films prepared by reactive magnetron sputtering

Metallurgical and Materials Transactions A ◽

10.1007/s11661-005-0116-1 ◽

2005 ◽

Vol 36 (9) ◽

pp. 2435-2439 ◽

Author(s):

A. A. Ogwu ◽

F. Placido ◽

O. Ademosu ◽

S. Moh ◽

E. Crossan ◽

...

Keyword(s):

Surface Energy ◽

Magnetron Sputtering ◽

Copper Oxide ◽

Reactive Magnetron Sputtering ◽

Theory Approach ◽

Reactive Magnetron ◽

Oxide Thin Films

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Impact of the Oxygen Flow during the Magnetron Sputtering Deposition on the Indium Tin Oxide thin films for Silicon Heterojunction Solar Cell

2019 IEEE 46th Photovoltaic Specialists Conference (PVSC) ◽

10.1109/pvsc40753.2019.8980906 ◽

2019 ◽

Author(s):

Brahim Aissa ◽

Christophe Ballif ◽

Yahya Zakaria ◽

Amir A. Abdallah ◽

Maulid M. Kivambe ◽

...

Keyword(s):

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Heterojunction Solar Cell ◽

Oxygen Flow ◽

Oxide Thin Films ◽

Sputtering Deposition ◽

Silicon Heterojunction Solar Cell

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Morphology, topography and thickness of copper oxide thin films deposited using magnetron sputtering technique

RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics ◽

10.1109/rsm.2013.6706548 ◽

2013 ◽

Author(s):

Jia Wei Low ◽

Nafarizal Nayan ◽

Mohd Zainizan Sahdan ◽

Mohd Khairul Ahmad ◽

Ali Yeon Md Shakaff ◽

...

Keyword(s):

Magnetron Sputtering ◽

Copper Oxide ◽

Oxide Thin Films

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