X-ray Diffraction Studies of Polycrystalline Thin Films Using Glancing Angle Diffractometry
Keyword(s):
X Ray
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AbstractThe use of conventional θ/2θ diffraction methods for the characterization of polycrystalline thin films is not in general a satisfactory technique due to the relatively deep penetration of x-ray photons in most materials. Glancing incidence diffraction (GID) can compensate for the penetration problems inherent in the θ/2θ geometry. Parallel beam geometry has been developed in conjunction with GID to eliminate the focusing aberrations encountered when performing these types of measurements. During the past yearwe developed a parallel beam attachment which we have successfully configured to a number of systems.
1996 ◽
Vol 52
(a1)
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pp. C361-C361
1991 ◽
Vol 9
(4)
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pp. 2477-2482
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1990 ◽
Vol 37
(1)
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pp. 141-144