LM-ACT for Imaging RAM Devices in X-ray Diffraction Topographs
Keyword(s):
X Ray
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Analysis of serai conductor material and associated integrated circuits (IC) is imperative for ensuring quality products. Currently, routine circuit testing is dominated by measurement of the optical and electrical material/device properties through final device performance and parametric testing.Characterization of the crystal microstructure still is not considered a routine process test. Structural characterization usually is based on double-crystal rocking curves, x-ray topography, or a combination of these techniques.
Keyword(s):
2005 ◽
Vol 66
(1)
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pp. 81-90
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1991 ◽
pp. 1-8
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2012 ◽
Vol 190
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pp. 24-28
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