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Effects of ion beam voltage on properties of indium tin oxide films prepared by ion beam sputtering
Surface Engineering
◽
10.1179/174329407x215311
◽
2007
◽
Vol 23
(4)
◽
pp. 295-299
◽
Cited By ~ 3
Author(s):
D.-F. Lii
◽
J.-L. Huang
◽
I.-J. Jen
◽
S.-S. Lin
Keyword(s):
Tin Oxide
◽
Indium Tin Oxide
◽
Ion Beam
◽
Oxide Films
◽
Ion Beam Sputtering
◽
Beam Voltage
◽
Beam Sputtering
◽
Tin Oxide Films
Download Full-text
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References
Temperature effect on structure and surface morphology of indium tin oxide films deposited by reactive ion-beam sputtering
Vacuum
◽
10.1016/j.vacuum.2005.11.035
◽
2006
◽
Vol 80
(7)
◽
pp. 708-711
◽
Cited By ~ 11
Author(s):
S. Iwatsubo
Keyword(s):
Surface Morphology
◽
Temperature Effect
◽
Tin Oxide
◽
Indium Tin Oxide
◽
Ion Beam
◽
Oxide Films
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Tin Oxide Films
Download Full-text
Ultraflat indium tin oxide films prepared by ion beam sputtering
Thin Solid Films
◽
10.1016/j.tsf.2004.05.125
◽
2005
◽
Vol 473
(2)
◽
pp. 218-223
◽
Cited By ~ 21
Author(s):
Younggun Han
◽
Donghwan Kim
◽
Jun-Sik Cho
◽
Seok-Keun Koh
Keyword(s):
Tin Oxide
◽
Indium Tin Oxide
◽
Ion Beam
◽
Oxide Films
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Tin Oxide Films
Download Full-text
Nanostructure and Physical Properties Control of Indium Tin Oxide Films Prepared at Room Temperature through Ion Beam Sputtering Deposition at Oblique Angles
The Journal of Physical Chemistry C
◽
10.1021/acs.jpcc.9b02885
◽
2019
◽
Vol 123
(22)
◽
pp. 14036-14046
◽
Cited By ~ 1
Author(s):
B. Lacroix
◽
A. J. Santos
◽
S. Hurand
◽
A. Corvisier
◽
F. Paumier
◽
...
Keyword(s):
Physical Properties
◽
Tin Oxide
◽
Indium Tin Oxide
◽
Room Temperature
◽
Ion Beam
◽
Oxide Films
◽
Ion Beam Sputtering
◽
Sputtering Deposition
◽
Beam Sputtering
◽
Tin Oxide Films
Download Full-text
In situ electrical and mechanical study of Indium Tin Oxide films deposited on polyimide substrate by Xe ion beam sputtering
Thin Solid Films
◽
10.1016/j.tsf.2021.139035
◽
2022
◽
Vol 741
◽
pp. 139035
Author(s):
T. Chommaux
◽
P.O. Renault
◽
D. Thiaudière
◽
P. Godard
◽
F. Paumier
◽
...
Keyword(s):
Tin Oxide
◽
Indium Tin Oxide
◽
Ion Beam
◽
Oxide Films
◽
Ion Beam Sputtering
◽
Polyimide Substrate
◽
Mechanical Study
◽
Beam Sputtering
◽
Tin Oxide Films
Download Full-text
Effects of annealing on the properties of indium–tin oxide films prepared by ion beam sputtering
Surface and Coatings Technology
◽
10.1016/j.surfcoat.2004.03.025
◽
2005
◽
Vol 192
(1)
◽
pp. 106-111
◽
Cited By ~ 30
Author(s):
Ding-Fwu Lii
◽
Jow-Lay Huang
◽
Iau-Jiue Jen
◽
Su-Shia Lin
◽
Pavol Sajgalik
Keyword(s):
Tin Oxide
◽
Indium Tin Oxide
◽
Ion Beam
◽
Oxide Films
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Tin Oxide Films
Download Full-text
Synthesis of tin oxide films by dual ion beam sputtering using Sn target and oxygen ion beam
Surface and Coatings Technology
◽
10.1016/s0257-8972(98)00759-2
◽
1999
◽
Vol 112
(1-3)
◽
pp. 267-270
◽
Cited By ~ 8
Author(s):
Yong-Sahm Choe
◽
Jae-Ho Chung
◽
Dae-Seung Kim
◽
Hong Koo Baik
Keyword(s):
Tin Oxide
◽
Ion Beam
◽
Oxide Films
◽
Ion Beam Sputtering
◽
Oxygen Ion
◽
Beam Sputtering
◽
Dual Ion Beam Sputtering
◽
Tin Oxide Films
Download Full-text
High-quality indium tin oxide films prepared at room temperature by oxygen ion beam assisted deposition
EPL (Europhysics Letters)
◽
10.1209/epl/i2002-00147-6
◽
2002
◽
Vol 59
(4)
◽
pp. 606-611
◽
Cited By ~ 14
Author(s):
C Liu
◽
T Matsutani
◽
N Yamamoto
◽
M Kiuchi
Keyword(s):
Tin Oxide
◽
Indium Tin Oxide
◽
Room Temperature
◽
Ion Beam
◽
Oxide Films
◽
High Quality
◽
Oxygen Ion
◽
Ion Beam Assisted Deposition
◽
Tin Oxide Films
Download Full-text
Preparation and characterization of indium tin oxide films formed by oxygen ion beam assisted deposition
Solid State Communications
◽
10.1016/s0038-1098(03)00237-0
◽
2003
◽
Vol 126
(9)
◽
pp. 509-513
◽
Cited By ~ 27
Author(s):
C. Liu
◽
T. Mihara
◽
T. Matsutani
◽
T. Asanuma
◽
M. Kiuchi
Keyword(s):
Tin Oxide
◽
Indium Tin Oxide
◽
Ion Beam
◽
Oxide Films
◽
Oxygen Ion
◽
Ion Beam Assisted Deposition
◽
Tin Oxide Films
Download Full-text
Room-temperature growth of crystalline indium tin oxide films on glass using low-energy oxygen-ion-beam assisted deposition
Journal of Applied Physics
◽
10.1063/1.1538335
◽
2003
◽
Vol 93
(4)
◽
pp. 2262-2266
◽
Cited By ~ 36
Author(s):
C. Liu
◽
T. Matsutani
◽
T. Asanuma
◽
K. Murai
◽
M. Kiuchi
◽
...
Keyword(s):
Tin Oxide
◽
Indium Tin Oxide
◽
Room Temperature
◽
Ion Beam
◽
Oxide Films
◽
Low Energy
◽
Temperature Growth
◽
Oxygen Ion
◽
Ion Beam Assisted Deposition
◽
Tin Oxide Films
Download Full-text
Structural, electrical and optical properties of indium tin oxide films prepared by low-energy oxygen-ion-beam assisted deposition
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/s0168-583x(03)00760-2
◽
2003
◽
Vol 206
◽
pp. 348-352
◽
Cited By ~ 10
Author(s):
C. Liu
◽
T. Matsutani
◽
T. Asanuma
◽
M. Kiuchi
Keyword(s):
Optical Properties
◽
Tin Oxide
◽
Indium Tin Oxide
◽
Ion Beam
◽
Oxide Films
◽
Low Energy
◽
Electrical And Optical Properties
◽
Oxygen Ion
◽
Ion Beam Assisted Deposition
◽
Tin Oxide Films
Download Full-text
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