The impact of thickness and thermal annealing on refractive index for aluminum oxide thin films deposited by atomic layer deposition
Keyword(s):
Keyword(s):
2019 ◽
Vol 37
(4)
◽
pp. 040901
◽
Keyword(s):
2020 ◽
Vol 32
(5)
◽
pp. 1925-1936
◽
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
2017 ◽
Vol 309
◽
pp. 600-608
◽
Keyword(s):