A flexible model for studying fringe field effect on parallel plate actuators

Abstract Electrostatic parallel plate actuators are common in micro-electro-mechanical systems due to their compatibility with micro-fabrication technology. Parallel plate actuators suffer from an instability problem called the pull-in phenomenon that happens when the applied DC voltage exceeds a certain value called the static pull-in voltage. The value of this critical voltage is important in many applications that depend on parallel plate actuators such as switches and static gas sensors. The fringe field around the edges of the plates could severely affect the performance of the actuator. This paper introduces a new model for the parallel plate actuator to calculate the value of static pull-in voltage. The proposed model considers the fringe field between the two plates. The static pull-in voltage of some PolyMUMPs actuators is practically measured and compared to the simulation results that involve the fringe field effect. The model is simulated using MATLAB to show the influence of that field on the static pull-in voltage. The MATLAB results of the proposed model are validated with ANSYS.

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Progress in Research of Flexible MEMS Microelectrodes for Neural Interface

10.20944/preprints201705.0052.v1 ◽

2017 ◽

Author(s):

Long-Jun Tang ◽

Hong-Chang Tian ◽

Xiao-Yang Kang ◽

Wen Hong ◽

Jing-Quan Liu

Keyword(s):

Performance Improvement ◽

Rapid Development ◽

Neural Interface ◽

Fabrication Technology ◽

Future Directions ◽

Micro Fabrication ◽

Micro Electro Mechanical Systems ◽

Interface Modification ◽

Tissue Interface ◽

Electrophysiological Signal

With the rapid development of MEMS (Micro-electro-mechanical Systems) fabrication technologies, manifolds microelectrodes with various structures and functions have been designed and fabricated for applications in biomedical research, diagnosis and treatment through electrical stimulation and electrophysiological signal recording. The flexible MEMS microelectrodes exhibit multi-aspect excellent characteristics beyond stiff microelectrodes based on silicon or SU-8, which comprising: lighter weight, smaller volume, better conforming to neural tissue and lower fabrication cost. In this paper, we mainly reviewed key technologies on flexible MEMS microelectrodes for neural interface in recent years, including: design and fabrication technology, flexible MEMS microelectrodes with fluidic channels and electrode-tissue interface modification technology for performance improvement. Furthermore, the future directions of flexible MEMS microelectrodes for neural interface were described including transparent and stretchable microelectrodes integrated with multi-aspect functions and next-generation electrode-tissue interface modifications facilitated electrode efficacy and safety during implantation. Finally, the combinations among micro fabrication techniques with biomedical engineering and nanotechnology represented by flexible MEMS microelectrodes for neural interface will open a new gate to human lives and understanding of the world.

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