scholarly journals Progress in Research of Flexible MEMS Microelectrodes for Neural Interface

2017 ◽  
Author(s):  
Long-Jun Tang ◽  
Hong-Chang Tian ◽  
Xiao-Yang Kang ◽  
Wen Hong ◽  
Jing-Quan Liu
Keyword(s):  
Performance Improvement ◽  
Rapid Development ◽  
Neural Interface ◽  
Fabrication Technology ◽  
Future Directions ◽  
Micro Fabrication ◽  
Micro Electro Mechanical Systems ◽  
Interface Modification ◽  
Tissue Interface ◽  
Electrophysiological Signal

With the rapid development of MEMS (Micro-electro-mechanical Systems) fabrication technologies, manifolds microelectrodes with various structures and functions have been designed and fabricated for applications in biomedical research, diagnosis and treatment through electrical stimulation and electrophysiological signal recording. The flexible MEMS microelectrodes exhibit multi-aspect excellent characteristics beyond stiff microelectrodes based on silicon or SU-8, which comprising: lighter weight, smaller volume, better conforming to neural tissue and lower fabrication cost. In this paper, we mainly reviewed key technologies on flexible MEMS microelectrodes for neural interface in recent years, including: design and fabrication technology, flexible MEMS microelectrodes with fluidic channels and electrode-tissue interface modification technology for performance improvement. Furthermore, the future directions of flexible MEMS microelectrodes for neural interface were described including transparent and stretchable microelectrodes integrated with multi-aspect functions and next-generation electrode-tissue interface modifications facilitated electrode efficacy and safety during implantation. Finally, the combinations among micro fabrication techniques with biomedical engineering and nanotechnology represented by flexible MEMS microelectrodes for neural interface will open a new gate to human lives and understanding of the world.

scholarly journals A flexible model for studying fringe field effect on parallel plate actuators

2020 ◽  
Vol 7 (1) ◽  
Author(s):  
Ahmad Elshenety ◽  
E. E. El-Kholy ◽  
Ahmed F. Abdou ◽  
Mostafa Soliman ◽  
Mohsen M. Elhagry
Keyword(s):  
Field Effect ◽  
Parallel Plate ◽  
Fringe Field ◽  
Critical Voltage ◽  
Fabrication Technology ◽  
Micro Fabrication ◽  
Micro Electro Mechanical Systems ◽  
Proposed Model ◽  
Flexible Model ◽  
Fringe Field Effect

Abstract Electrostatic parallel plate actuators are common in micro-electro-mechanical systems due to their compatibility with micro-fabrication technology. Parallel plate actuators suffer from an instability problem called the pull-in phenomenon that happens when the applied DC voltage exceeds a certain value called the static pull-in voltage. The value of this critical voltage is important in many applications that depend on parallel plate actuators such as switches and static gas sensors. The fringe field around the edges of the plates could severely affect the performance of the actuator. This paper introduces a new model for the parallel plate actuator to calculate the value of static pull-in voltage. The proposed model considers the fringe field between the two plates. The static pull-in voltage of some PolyMUMPs actuators is practically measured and compared to the simulation results that involve the fringe field effect. The model is simulated using MATLAB to show the influence of that field on the static pull-in voltage. The MATLAB results of the proposed model are validated with ANSYS.

scholarly journals A Stochastic Model to Describe the Scattering in the Response of Polysilicon MEMS

2021 ◽  
Vol 2 (1) ◽  
pp. 95
Author(s):  
Luca Dassi ◽  
Marco Merola ◽  
Eleonora Riva ◽  
Angelo Santalucia ◽  
Andrea Venturelli ◽  
...  
Keyword(s):  
Silicon Film ◽  
Micro Fabrication ◽  
Micro Electro Mechanical Systems ◽  
Local Fluctuations ◽  
Stochastic Framework ◽  
On Line ◽  
Chip Testing ◽  
On Chip ◽  
Time Required ◽  
Polycrystalline Silicon Film

The current miniaturization trend in the market of inertial microsystems is leading to movable device parts with sizes comparable to the characteristic length-scale of the polycrystalline silicon film morphology. The relevant output of micro electro-mechanical systems (MEMS) is thus more and more affected by a scattering, induced by features resulting from the micro-fabrication process. We recently proposed an on-chip testing device, specifically designed to enhance the aforementioned scattering in compliance with fabrication constraints. We proved that the experimentally measured scattering cannot be described by allowing only for the morphology-affected mechanical properties of the silicon films, and etch defects must be properly accounted for too. In this work, we discuss a fully stochastic framework allowing for the local fluctuations of the stiffness and of the etch-affected geometry of the silicon film. The provided semi-analytical solution is shown to catch efficiently the measured scattering in the C-V plots collected through the test structure. This approach opens up the possibility to learn on-line specific features of the devices, and to reduce the time required for their calibration.

Microsteganography on All Inorganic Perovskite Micro-Platelets by Direct Laser Writing

Nanoscale ◽  
2021 ◽  
Author(s):  
Yuhang Sheng ◽  
Cihui Liu ◽  
Liyan Yu ◽  
Yunyi Yang ◽  
Fengrui Hu ◽  
...  
Keyword(s):  
Direct Laser Writing ◽  
Fabrication Technology ◽  
Laser Writing ◽  
Micro Fabrication ◽  
Inorganic Perovskite ◽  
Pattern Structures ◽  
Direct Laser ◽  
Cost Efficient ◽  
Micro Fabrication Technology

Direct laser writing (DLW) is a mask-free and cost-efficient micro-fabrication technology, which has been explored to pattern structures on perovskites. However, there is still a lack of research on DLW...

Silicon Carbide Radiation Detectors: Progress, Limitations and Future Directions

2013 ◽  
Vol 1576 ◽  
Author(s):  
Frank H. Ruddy
Keyword(s):  
Silicon Carbide ◽  
Rapid Development ◽  
Chemical Vapor ◽  
Radiation Detectors ◽  
Neutron Detectors ◽  
Future Directions ◽  
Materials Development ◽  
Late Twentieth ◽  
Manufacturing Techniques ◽  
Further Development

ABSTRACTSilicon carbide has long been a promising material for semiconductor applications in high-temperature environments. Although silicon carbide radiation detectors were demonstrated more than a half century ago, the unavailability of high-quality materials and device manufacturing techniques hindered further development until about twenty years ago. In the late twentieth century, the development of advanced SiC crystal growth and epitaxial chemical vapor deposition methods spurred rapid development of silicon carbide charged particle, X-ray and neutron detectors. The history and status of silicon carbide radiation detectors as well as the influence of materials and device packaging limitations on future detector development will be discussed. Specific silicon carbide materials development needs will be identified.

scholarly journals MEMS Ultrasound Transducers for Endoscopic Photoacoustic Imaging Applications

Micromachines ◽  
2020 ◽  
Vol 11 (10) ◽  
pp. 928 ◽  
Author(s):  
Haoran Wang ◽  
Yifei Ma ◽  
Hao Yang ◽  
Huabei Jiang ◽  
Yingtao Ding ◽  
...  
Keyword(s):  
Microelectromechanical Systems ◽  
Vibration Mode ◽  
Photoacoustic Imaging ◽  
Rapid Development ◽  
Flexural Vibration ◽  
Ultrasound Transducers ◽  
Optical Contrast ◽  
Future Directions ◽  
Potential Applications ◽  
Mems Technology

Photoacoustic imaging (PAI) is drawing extensive attention and gaining rapid development as an emerging biomedical imaging technology because of its high spatial resolution, large imaging depth, and rich optical contrast. PAI has great potential applications in endoscopy, but the progress of endoscopic PAI was hindered by the challenges of manufacturing and assembling miniature imaging components. Over the last decade, microelectromechanical systems (MEMS) technology has greatly facilitated the development of photoacoustic endoscopes and extended the realm of applicability of the PAI. As the key component of photoacoustic endoscopes, micromachined ultrasound transducers (MUTs), including piezoelectric MUTs (pMUTs) and capacitive MUTs (cMUTs), have been developed and explored for endoscopic PAI applications. In this article, the recent progress of pMUTs (thickness extension mode and flexural vibration mode) and cMUTs are reviewed and discussed with their applications in endoscopic PAI. Current PAI endoscopes based on pMUTs and cMUTs are also introduced and compared. Finally, the remaining challenges and future directions of MEMS ultrasound transducers for endoscopic PAI applications are given.

Fabrication of Polymer Optical Waveguides for the 1.5-μm Band Using Focused Proton Beam

2011 ◽  
Vol 497 ◽  
pp. 147-150 ◽  
Author(s):  
Kenta Miura ◽  
Yuki Machida ◽  
Masato Uehara ◽  
Hiromu Kiryu ◽  
Yusuke Ozawa ◽  
...  
Keyword(s):  
Proton Beam ◽  
Optical Waveguides ◽  
Single Mode ◽  
Fabrication Technology ◽  
Beam Irradiation ◽  
Proton Beam Irradiation ◽  
Micro Fabrication ◽  
Straight Line ◽  
Drawing Technique ◽  
Micro Patterns

Proton beam writing (PBW) has attracted much attention recently as a next-generation micro-fabrication technology. It is a direct-drawing technique and does not need any masks to transfer micro-patterns to sample surfaces. In addition, the refractive index of a poly (methyl methacrylate) (PMMA) can be increased by proton-beam irradiation. In this study, we fabricated the first 1.5-μm-band single-mode, straight-line waveguides and Y-junction waveguides consisting of PMMA layers using the PBW technique.

Inclination Angle Effect on Surface of Copper in Biomachining

2014 ◽  
Vol 660 ◽  
pp. 23-27 ◽  
Author(s):  
Jos Istiyanto ◽  
Mohamad Taufiqurrakhman ◽  
Gandjar Kiswanto ◽  
Iman Santoso ◽  
Tae Jo Ko
Keyword(s):  
Surface Roughness ◽  
Culture Medium ◽  
Metal Removal ◽  
Measurement Data ◽  
Surface Profile ◽  
Copper Surface ◽  
Fabrication Technology ◽  
Micro Fabrication ◽  
Profile Shape ◽  
Angle Effect

Nowadays micro fabrication technology is very varied and being continuously developed. One of them uses bacteria as tools that known as biomachining.Acidithiobacillus ferooxidansis a one of bacteria which can do metal removal as a source of energy. The previous research has proven the ability ofAcidithiobacillus ferooxidansfor material removal process. In this research, biomachining process was added by angle of inclination parameter to know the effect on copper surface profile and roughness. This method was used to get profile shape result of multi-axis in biomachining. Workpieces were patterned by photolithography method and put in the bacterial culture medium, which was inclined 20° and 30° on inclinator. Profile shape and the surface roughness measurement data were taken by SURFCOM machine. The results of this research showed that by inclining 20° and 30° of biomachining sample produced different profile shapes and surface roughness.

scholarly journals Gas sensing performance at room temperature of nanogap interdigitated electrodes for detection of acetone at low concentration

RSC Advances ◽  
2017 ◽  
Vol 7 (79) ◽  
pp. 50279-50286 ◽  
Author(s):  
Q. Nguyen Minh ◽  
H. D. Tong ◽  
A. Kuijk ◽  
F. van de Bent ◽  
P. Beekman ◽  
...  
Keyword(s):  
Large Scale ◽  
Room Temperature ◽  
Gas Sensing ◽  
Fabrication Technology ◽  
Micro Fabrication ◽  
Interdigitated Electrodes ◽  
Low Concentration ◽  
Sensing Applications ◽  
Nanogap Electrodes ◽  
Sensing Performance

A facile approach for the fabrication of large-scale interdigitated nanogap electrodes (nanogap IDEs) with a controllable gap was demonstrated with conventional micro-fabrication technology to develop chemocapacitors for gas sensing applications.

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