Multiscale Modeling and Control of Porous Thin Film Growth

2010 ◽  
pp. 13-1-13-17
Author(s):  
Gangshi Hu ◽  
Xinyu Zhang ◽  
Gerassimos Orkoulas ◽  
Panagiotis Christofides
Keyword(s):  
Thin Film ◽  
Multiscale Modeling ◽  
Film Growth ◽  
Thin Film Growth ◽  
Modeling And Control ◽  
Porous Thin Film ◽  
And Control

scholarly journals Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor

2002 ◽  
Vol 62 (4) ◽  
pp. 1251-1280 ◽  
Author(s):  
G. M. Kepler ◽  
H. T. Banks ◽  
H. T. Tran ◽  
S. C. Beeler
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Reduced Order Modeling ◽  
Thin Film Growth ◽  
Modeling And Control ◽  
Reduced Order ◽  
And Control

Molecular dynamics simulation about porous thin-film growth in secondary deposition

2007 ◽  
Vol 253 (18) ◽  
pp. 7471-7477 ◽  
Author(s):  
Huawei Chen ◽  
A. Kiet Tieu ◽  
Qiang Liu ◽  
Ichiro Hagiwara ◽  
Cheng Lu
Keyword(s):  
Thin Film ◽  
Molecular Dynamics ◽  
Molecular Dynamics Simulation ◽  
Film Growth ◽  
Thin Film Growth ◽  
Dynamics Simulation ◽  
Porous Thin Film

Multiscale modeling of thin film growth

1998 ◽  
Vol 3 (6) ◽  
pp. 562-569 ◽  
Author(s):  
Klavs F Jensen ◽  
Seth T Rodgers ◽  
Rajesh Venkataramani
Keyword(s):  
Thin Film ◽  
Multiscale Modeling ◽  
Film Growth ◽  
Thin Film Growth

Dynamics and control of thin film growth process from a multicomponent gas

1997 ◽  
Vol 30 (20) ◽  
pp. 2794-2797 ◽  
Author(s):  
A L Fradkov ◽  
P Yu Guzenko ◽  
S A Kukushkin ◽  
A V Osipov
Keyword(s):  
Thin Film ◽  
Growth Process ◽  
Film Growth ◽  
Thin Film Growth ◽  
Multicomponent Gas ◽  
Dynamics And Control ◽  
And Control

An SDRE-Based Approach for HIV Feedback Control and Control of Thin Film Growth in a CVD Reactor

2011 ◽  
Vol 44 (1) ◽  
pp. 9601-9606 ◽  
Author(s):  
H.T. Banks ◽  
S.C. Beeler ◽  
Hee-Dae Kwon ◽  
B.M. Lewis ◽  
J.A. Toivanen ◽  
...  
Keyword(s):  
Thin Film ◽  
Feedback Control ◽  
Film Growth ◽  
Thin Film Growth ◽  
And Control
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