Thermal Conductivity and Thermal Interface Resistance Measurements of Thin Films using 3ω Method

2013 ◽  
Vol 4 (3-4) ◽  
pp. 85-106 ◽  
Author(s):  
Samskar Kuthati ◽  
Arvind Pattamatta
Author(s):  
Y. Sungtaek Ju ◽  
Gilhwan Cha

We consider different sources of potential systematic errors in the thermal interface resistance measurements. Sub-continuum heat conduction and spatial non-equilibrium between electrons and phonons in a metal may lead to overestimation of the thermal interface resistance. The use of an erroneous substrate thermal conductivity can also cause significant systematic errors in steady- and quasi-steady state measurements of the thermal interface resistance. Our results highlight an urgent need for new systematic experimental studies to confirm the magnitude of intrinsic thermal interface resistance.


Author(s):  
Amer M. Hamdan ◽  
Aric R. McLanahan ◽  
Robert F. Richards ◽  
Cecilia D. Richards

This work presents the characterization of a thermal interface material consisting of an array of mercury micro droplets deposited on a silicon die. Three arrays were tested, a 40 × 40 array (1600 grid) and two 20 × 20 arrays (400 grid). All arrays were assembled on a 4 × 4 mm2 silicon die. An experimental facility which measures the thermal resistance across the mercury array under steady state conditions is described. The thermal interface resistance of the arrays was characterized as a function of the applied load. A thermal interface resistance as low as 0.253 mm2 K W−1 was measured. A model to predict the thermal resistance of a liquid-metal micro droplet array was developed and compared to the experimental results. The model predicts the deformation of the droplet array under an applied load and then the geometry of the deformed droplets is used to predict the thermal resistance of the array. The contact resistance of the mercury arrays was estimated based on the experimental and model data. An average contact resistance was estimated to be 0.14 mm2 K W−1.


MRS Advances ◽  
2016 ◽  
Vol 1 (22) ◽  
pp. 1631-1636 ◽  
Author(s):  
Boya Cui ◽  
D. Bruce Buchholz ◽  
Li Zeng ◽  
Michael Bedzyk ◽  
Robert P. H. Chang ◽  
...  

ABSTRACTThe cross-plane thermal conductivities of InGaZnO (IGZO) thin films in different morphologies were measured on three occasions within 19 months, using the 3ω method at room temperature 300 K. Amorphous (a-), semi-crystalline (semi-c-) and crystalline (c-) IGZO films were grown by pulsed laser deposition (PLD), followed by X-ray diffraction (XRD) for evaluation of film quality and crystallinity. Semi-c-IGZO shows the highest thermal conductivity, even higher than the most ordered crystal-like phase. After being stored in dry low-oxygen environment for months, a drastic decrease of semi-c-IGZO thermal conductivity was observed, while the thermal conductivity slightly reduced in c-IGZO and remained unchanged in a-IGZO. This change in thermal conductivity with storage time can be attributed to film structural relaxation and vacancy diffusion to grain boundaries.


2002 ◽  
Vol 91 (12) ◽  
pp. 9772 ◽  
Author(s):  
Tsuneyuki Yamane ◽  
Naoto Nagai ◽  
Shin-ichiro Katayama ◽  
Minoru Todoki

2019 ◽  
Vol 201 ◽  
pp. 160-169
Author(s):  
Murali Gopal Muraleedharan ◽  
Umesh Unnikrishnan ◽  
Asegun Henry ◽  
Vigor Yang

2017 ◽  
Vol 641 ◽  
pp. 34-37 ◽  
Author(s):  
Ji Hye Kwak ◽  
Jun Gu Kang ◽  
Ho-Soon Yang ◽  
Euh Duck Jeong ◽  
Hyun Gyu Kim ◽  
...  

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