Prediction of the bidirectional reflectance-distribution function from atomic-force and scanning–tunneling microscope measurements of interfacial roughness

1995 ◽  
Vol 34 (7) ◽  
pp. 1229 ◽  
Author(s):  
William M. Bruno ◽  
James A. Roth ◽  
Philip E. Burke ◽  
William B. Hewitt ◽  
Randal E. Holmbeck ◽  
...  
Keyword(s):  
Distribution Function ◽  
Scanning Tunneling Microscope ◽  
Scanning Tunneling ◽  
Bidirectional Reflectance Distribution Function ◽  
Bidirectional Reflectance ◽  
Interfacial Roughness ◽  
Tunneling Microscope ◽  
Atomic Force ◽  
Bidirectional Reflectance Distribution

Application of the Measured Slope Distribution to the Prediction of the Bidirectional Reflectance for Rough Surfaces

2003 ◽  
Author(s):  
Q. Z. Zhu ◽  
Z. M. Zhang
Keyword(s):  
Distribution Function ◽  
Atomic Force Microscope ◽  
Surface Topography ◽  
Rough Surface ◽  
Bidirectional Reflectance Distribution Function ◽  
Bidirectional Reflectance ◽  
Atomic Force ◽  
Surface Profiles ◽  
Bidirectional Reflectance Distribution ◽  
Surface Comparison

Surface topography of the rough side of a silicon wafer is characterized using an atomic force microscope (AFM). The slope distribution calculated from the measured surface profiles deviates significantly from the Gaussian distribution. The experimentally obtained slope distribution is incorporated into a geometric-optics model to predict the bidirectional reflectance distribution function (BRDF) of the rough surface. Comparison has been made between the predicted BRDF and that measured with a recently built bidirectional scatterometer, at 635 nm and 785 nm for different incoming angles. The trends agree well between the predicted and measured BRDFs, especially for the parallel-polarized incidence (p-polarization), although relatively large discrepancies exist near the specular peak and at large reflection angles. This work offers a plausible explanation of the second non-specular peak in the observed BRDF as associated with the subsidiary maximum in the slope distribution. Anisotropic features have been found both in the calculated slope distributions and the measured BRDFs.

Anisotropic Slope Distribution and Bidirectional Reflectance of a Rough Silicon Surface

2004 ◽  
Vol 126 (6) ◽  
pp. 985-993 ◽  
Author(s):  
Q. Z. Zhu ◽  
Z. M. Zhang
Keyword(s):  
Distribution Function ◽  
Atomic Force Microscope ◽  
Silicon Surface ◽  
The Other ◽  
Two Dimensional ◽  
Bidirectional Reflectance Distribution Function ◽  
Bidirectional Reflectance ◽  
One Dimensional ◽  
Atomic Force ◽  
Bidirectional Reflectance Distribution

Both one-dimensional (1D) and two-dimensional (2D) slope distributions were obtained from the surface topographic data, measured using an atomic force microscope for a rough silicon surface. The resulted slope distributions deviate significantly from the Gaussian distribution, with noticeable side peaks. The bidirectional reflectance distribution function (BRDF) of the same surface, measured with a laser scatterometer at 635 nm and 785 nm, exhibits subsidiary peaks. The measured slope distributions are implanted into a geometric optics model to predict the in-plane BRDF for different azimuthal angles. The 1D slope distribution has some success in predicting the BRDF at limited azimuthal angles, but is not applicable to other cases. On the other hand, the BRDF predicted using the 2D slope distribution matches well with the experimental results for any azimuthal angles. The method developed here may also help predict the BRDF for other rough surfaces with microstructures.

The atomic-force microscope and its future in biology

1993 ◽  
Vol 51 ◽  
pp. 704-705
Author(s):  
Jean-Paul Revel
Keyword(s):  
Silicon Nitride ◽  
Laser Beam ◽  
Atomic Force Microscope ◽  
Scanning Tunneling Microscope ◽  
Point Of View ◽  
Scanning Tunneling ◽  
Close Relative ◽  
Tunneling Microscope ◽  
Atomic Force ◽  
Sharp Point

The last few years have been marked by a series of remarkable developments in microscopy. Perhaps the most amazing of these is the growth of microscopies which use devices where the place of the lens has been taken by probes, which record information about the sample and display it in a spatial from the point of view of the context. From the point of view of the biologist one of the most promising of these microscopies without lenses is the scanned force microscope, aka atomic force microscope.This instrument was invented by Binnig, Quate and Gerber and is a close relative of the scanning tunneling microscope. Today's AFMs consist of a cantilever which bears a sharp point at its end. Often this is a silicon nitride pyramid, but there are many variations, the object of which is to make the tip sharper. A laser beam is directed at the back of the cantilever and is reflected into a split, or quadrant photodiode.

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