Multiple-step triangular-pattern phase shifting and the influence of number of steps and pitch on measurement accuracy

2007 ◽  
Vol 46 (16) ◽  
pp. 3253 ◽  
Author(s):  
Peirong Jia ◽  
Jonathan Kofman ◽  
Chad English
2016 ◽  
Vol 679 ◽  
pp. 129-134
Author(s):  
Wan Duo Wu ◽  
Qiang Xian Huang ◽  
Chao Qun Wang ◽  
Ting Ting Wu ◽  
Hong Xie

The technique utilizing single-frequency laser interferometry has very high measurement accuracy, but it has rigorous requirements for optical design which is affected by many factors. In order to achieve single-frequency laser interferometry with large stroke and high precision, the integral layout, the polarization phase shifting technique and the common mode rejection method are adopted to design the length interferometry system. This paper analyzes factors and design requirements which affect measurement accuracy with large stroke. Based on polarization phase shifting technique, the system employs the four-beam-signal detection technique and the common mode rejection method, to make a differential processing of four mutually orthogonal signals. Thus, the influences of zero-drift of intensity and environmental change on system are reduced. Combined with a 200 phase subdivision, the system achieves the resolution with 0.8 nm. Under the VC++ environment, the displacement measurement results are compensated and corrected according to the environmental parameters. Compared with the Renishaw XL-80 laser interferometer, the system has better stability in short term. In the measuring range of 60 mm, the effectiveness of the system is verified.


2014 ◽  
Vol 487 ◽  
pp. 298-301
Author(s):  
Vithyacharan Retnasamy ◽  
Zaliman Sauli ◽  
Nor Shakirina Nadzri ◽  
Christopher John Veriven

A three-dimensional surface measurement using fringe projection technique has received attention among the researches for the last few decades.However choosing the best method is the challenge because one needs to consider the cost, measurement speed, system complexity, measurement accuracy and data reliability to ensure the success of the measurement. This paper focused on the successful manipulation of non-collimated light source and three step phase shifting for height measurement of a lead frame.The measurement done based on pixel determination from the saw tooth image. In addition, the scaling factor technique has been employed for the measurement accuracy. The experimental results achieved a high precision of measurement with simple system and high speed capability.


2007 ◽  
Vol 14 (6) ◽  
pp. 401-405 ◽  
Author(s):  
Toshiaki Matsuura ◽  
Satoru Okagaki ◽  
Takaaki Nakamura ◽  
Yasushi Oshikane ◽  
Haruyuki Inoue ◽  
...  

Author(s):  
Y. Pan

The D defect, which causes the degradation of gate oxide integrities (GOI), can be revealed by Secco etching as flow pattern defect (FPD) in both float zone (FZ) and Czochralski (Cz) silicon crystal or as crystal originated particles (COP) by a multiple-step SC-1 cleaning process. By decreasing the crystal growth rate or high temperature annealing, the FPD density can be reduced, while the D defectsize increased. During the etching, the FPD surface density and etch pit size (FPD #1) increased withthe etch depth, while the wedge shaped contours do not change their positions and curvatures (FIG.l).In this paper, with atomic force microscopy (AFM), a simple model for FPD morphology by non-crystallographic preferential etching, such as Secco etching, was established.One sample wafer (FPD #2) was Secco etched with surface removed by 4 μm (FIG.2). The cross section view shows the FPD has a circular saucer pit and the wedge contours are actually the side surfaces of a terrace structure with very small slopes. Note that the scale in z direction is purposely enhanced in the AFM images. The pit dimensions are listed in TABLE 1.


Methodology ◽  
2007 ◽  
Vol 3 (1) ◽  
pp. 14-23 ◽  
Author(s):  
Juan Ramon Barrada ◽  
Julio Olea ◽  
Vicente Ponsoda

Abstract. The Sympson-Hetter (1985) method provides a means of controlling maximum exposure rate of items in Computerized Adaptive Testing. Through a series of simulations, control parameters are set that mark the probability of administration of an item on being selected. This method presents two main problems: it requires a long computation time for calculating the parameters and the maximum exposure rate is slightly above the fixed limit. Van der Linden (2003) presented two alternatives which appear to solve both of the problems. The impact of these methods in the measurement accuracy has not been tested yet. We show how these methods over-restrict the exposure of some highly discriminating items and, thus, the accuracy is decreased. It also shown that, when the desired maximum exposure rate is near the minimum possible value, these methods offer an empirical maximum exposure rate clearly above the goal. A new method, based on the initial estimation of the probability of administration and the probability of selection of the items with the restricted method ( Revuelta & Ponsoda, 1998 ), is presented in this paper. It can be used with the Sympson-Hetter method and with the two van der Linden's methods. This option, when used with Sympson-Hetter, speeds the convergence of the control parameters without decreasing the accuracy.


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