Deep reactive ion etched anti-reflection coatings for sub-millimeter silicon optics

Patricio A. Gallardo; Brian J. Koopman; Nicholas F. Cothard; Sarah Marie M. Bruno; German Cortes-Medellin; Galen Marchetti; Kevin H. Miller; Brenna Mockler; Michael D. Niemack; Gordon Stacey; Edward J. Wollack

doi:10.1364/ao.56.002796

Deep reactive ion etched anti-reflection coatings for sub-millimeter silicon optics

Applied Optics ◽

10.1364/ao.56.002796 ◽

2017 ◽

Vol 56 (10) ◽

pp. 2796 ◽

Cited By ~ 11

Author(s):

Patricio A. Gallardo ◽

Brian J. Koopman ◽

Nicholas F. Cothard ◽

Sarah Marie M. Bruno ◽

German Cortes-Medellin ◽

...

Keyword(s):

Silicon Optics

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An empirical survey on the influence of machining parameters on tool wear in diamond turning of large single-crystal silicon optics

Precision Engineering ◽

10.1016/s0141-6359(00)00069-6 ◽

2001 ◽

Vol 25 (4) ◽

pp. 247-257 ◽

Cited By ~ 41

Author(s):

D.Krulewich Born ◽

W.A. Goodman

Keyword(s):

Tool Wear ◽

Single Crystal ◽

Single Crystal Silicon ◽

Diamond Turning ◽

Machining Parameters ◽

Large Single Crystal ◽

Crystal Silicon ◽

Empirical Survey ◽

Silicon Optics

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Silicon optics

III-Vs Review ◽

10.1016/s0961-1290(03)01166-9 ◽

2003 ◽

Vol 16 (8) ◽

pp. 30

Keyword(s):

Silicon Optics

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Micro-laser assisted machining: the future of manufacturing silicon optics

Optifab 2017 ◽

10.1117/12.2281044 ◽

2017 ◽

Author(s):

Donald E. Morrison ◽

Deepak Ravindra ◽

Sai Kumar Kode ◽

Chris Stroshine ◽

Mike Mitchell

Keyword(s):

Laser Assisted Machining ◽

The Future ◽

Silicon Optics

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Multilayer antireflection coating for silicon optics at millimeter and submillimeter wavelengths (Conference Presentation)

Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy IX ◽

10.1117/12.2315785 ◽

2018 ◽

Author(s):

Fabien Defrance ◽

Goutam Chattopadhyay ◽

Jake Connors ◽

Sunil Golwala ◽

Matthew I. Hollister ◽

...

Keyword(s):

Antireflection Coating ◽

Submillimeter Wavelengths ◽

Silicon Optics ◽

Millimeter And Submillimeter Wavelengths

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An anti-reflection coating for silicon optics at terahertz frequencies

IEEE Microwave and Guided Wave Letters ◽

10.1109/75.856983 ◽

2000 ◽

Vol 10 (7) ◽

pp. 264-266 ◽

Cited By ~ 89

Author(s):

A.J. Gatesman ◽

J. Waldman ◽

M. Ji ◽

C. Musante ◽

S. Yagvesson

Keyword(s):

Terahertz Frequencies ◽

Silicon Optics

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Erratum: “On measurements of the refractive index dispersion in porous silicon” [Optics and Spectroscopy 93 (1), 132 (2002)]

Optics and Spectroscopy ◽

10.1134/1.1563698 ◽

2003 ◽

Vol 94 (3) ◽

pp. 482-482

Author(s):

M. I. Strashnikova

Keyword(s):

Refractive Index ◽

Porous Silicon ◽

Refractive Index Dispersion ◽

Silicon Optics

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An experimental investigation on the influence of machining parameters on surface finish in diamond turning of silicon optics

10.1117/12.2181525 ◽

2015 ◽

Cited By ~ 5

Author(s):

Neha Khatri ◽

Rohit Sharma ◽

Vinod Mishra ◽

Mukesh Kumar ◽

Vinod Karar ◽

...

Keyword(s):

Experimental Investigation ◽

Surface Finish ◽

Diamond Turning ◽

Machining Parameters ◽

Silicon Optics

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High efficiency antireflection coating in MWIR region (3.6–4.9μm) simultaneously effective for Germanium and Silicon optics

Infrared Physics & Technology ◽

10.1016/j.infrared.2009.08.006 ◽

2010 ◽

Vol 53 (1) ◽

pp. 33-36 ◽

Cited By ~ 11

Author(s):

Meenakshi Bhatt ◽

B.B. Nautiyal ◽

P.K. Bandyopadhyay

Keyword(s):

High Efficiency ◽

Antireflection Coating ◽

Silicon Optics

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Thorium free antireflection coating in MWIR region on Silicon optics

Infrared Physics & Technology ◽

10.1016/j.infrared.2012.05.005 ◽

2012 ◽

Vol 55 (5) ◽

pp. 409-411 ◽

Cited By ~ 4

Author(s):

Meenakshi Bhatt Kala ◽

P.K. Bandyopadhyay ◽

B.B. Nautiyal

Keyword(s):

Antireflection Coating ◽

Silicon Optics

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Reduction of the bulk absorption coefficient in silicon optics for high-energy lasers through defect engineering

Applied Optics ◽

10.1364/ao.34.003367 ◽

1995 ◽

Vol 34 (18) ◽

pp. 3367 ◽

Cited By ~ 2

Author(s):

William A. Goodman ◽

Mark S. Goorsky

Keyword(s):

Absorption Coefficient ◽

High Energy ◽

Defect Engineering ◽

Bulk Absorption ◽

High Energy Lasers ◽

Silicon Optics

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