Broadly Refractive Index Design for Porous Microdisk by Tuning Nano-porous Structure

Author(s):  
Yuya Mikami ◽  
Hiroaki Yoshioka ◽  
Nasim Obata ◽  
Taku Takagishi ◽  
Sangmin Han ◽  
...  
2012 ◽  
Vol 1428 ◽  
Author(s):  
Shoko Sugiyama Ono ◽  
Yasuhisa Kayaba ◽  
Tsuneji Suzuki ◽  
Hirofumi Tanaka ◽  
Kazuo Kohmura

ABSTRACTIt was found for the first time that the control of the size of pore sealant is important to prevent diffusions of pore sealant into pores of porous low-k films and to achieve a good toluene seal property. Two pore sealants (PS-A, B) were prepared and the seal property and porous structure were studied using toluene based ellipsometric porosimetry (EP) measurements. It was revealed that small pore sealant (PS-B) diffuses into pores of porous low-k (PLK) films and did not show any seal property, while large pore sealant (PS-A) does not diffuse into pores of porous low-k films and shows a good toluene seal property. Ellipsometry shows that PS-A forms conformal layer only on the vicinity of surface of porous low-k films, but porous structure of porous low-k films at the bottom part is kept, according the fact that the refractive index did not increase.Furthermore, we developed a new pore seal material (PS-C) to form ultra-thin conformal layer by a single pass, which shows a good toluene seal property. The dielectric constant increased from 2.10 to 2.25 by covering with PS-C. The obtained layer also shows the effect as the protect layer of porous low-k films from plasma damages.


2019 ◽  
Vol 126 (12) ◽  
pp. 125304
Author(s):  
Ki Hoon Yun ◽  
Doeun Kim ◽  
Young-Keun Jeong ◽  
Dong-Jin Yun ◽  
Woon Ik Park ◽  
...  

2014 ◽  
Vol 55 (5) ◽  
Author(s):  
Richard Häfeli ◽  
Marco Altheimer ◽  
Denis Butscher ◽  
Philipp Rudolf von Rohr

2018 ◽  
pp. 66-70

Caracterización óptica y estructural de monocapas de silicio poroso por medio de reflectancia en la región visible y rayos X Danilo Roque Huanca Instituto de Física e Química da Universidade Federal de Itajubá, Avenida B. P. S, 1303, Pinheirinho, Itajubá - MG, Brasil Recibido el 15 de noviembre del 2018. Aceptado el 21 de noviembre del 2018. DOI: https://doi.org/10.33017/RevECIPeru2018.0010/ Resumen Una monocapa de silicio poroso con porosidad variable a lo largo del espesor fue caracterizando usando diferentes técnicas ópticas. Los resultados muestran que las técnicas basadas en reflectancia en la región visible divergen en aproximadamente 20% de aquellas encontradas por medio de los métodos basados en rayos X. Esa divergencia es una consecuencia de la variación del índice de refracción con la longitud de onda, tanto de la estructura porosa como del líquido empleado para el análisis. Los resultados sugieren que la estructura porosa puede ser modelada como un conjunto de poros esféricos con radio que varía entre 3.0 nm a 4.4 nm, en adición a los poros con forma cilíndrica con radio entre 22 nm y 42 nm, mientras su altura lo hace entre 55 y102 nm. La porosidad de la estructura varia a lo largo del espesor entre 65-81 %. Descriptores: silicio poroso, reflectancia de rayos X, GISXASX, espectroscopia por infiltración de líquidos Abstract A porous silicon monolayer with porosity varying in depth was characterized using different optical methods. The results show that techniques based on reflectance in the visible region diverge in approximately 20% of those found by means of X-ray based methods. This divergence is associated to the wavelength dependence of the refractive index of both the porous structure and the infiltrated liquid inside the pores. The results suggest that the porous structure can be modeled as a set of spherical pores with radius ranging from 3.0 to 4.4 nm, in addition to cylindrical pores with radius and length varying between 22 and 42 nm, while its length does between 55 -102 nm. The porosity of the structure varies in depth between 65-81%.


Author(s):  
W. E. Lee

An optical waveguide consists of a several-micron wide channel with a slightly different index of refraction than the host substrate; light can be trapped in the channel by total internal reflection.Optical waveguides can be formed from single-crystal LiNbO3 using the proton exhange technique. In this technique, polished specimens are masked with polycrystal1ine chromium in such a way as to leave 3-13 μm wide channels. These are held in benzoic acid at 249°C for 5 minutes allowing protons to exchange for lithium ions within the channels causing an increase in the refractive index of the channel and creating the waveguide. Unfortunately, optical measurements often reveal a loss in waveguiding ability up to several weeks after exchange.


Author(s):  
Walter C. McCrone

An excellent chapter on this subject by V.D. Fréchette appeared in a book edited by L.L. Hench and R.W. Gould in 1971 (1). That chapter with the references cited there provides a very complete coverage of the subject. I will add a more complete coverage of an important polarized light microscope (PLM) technique developed more recently (2). Dispersion staining is based on refractive index and its variation with wavelength (dispersion of index). A particle of, say almandite, a garnet, has refractive indices of nF = 1.789 nm, nD = 1.780 nm and nC = 1.775 nm. A Cargille refractive index liquid having nD = 1.780 nm will have nF = 1.810 and nC = 1.768 nm. Almandite grains will disappear in that liquid when observed with a beam of 589 nm light (D-line), but it will have a lower refractive index than that liquid with 486 nm light (F-line), and a higher index than that liquid with 656 nm light (C-line).


1992 ◽  
Vol 139 (2) ◽  
pp. 163 ◽  
Author(s):  
M.R. Shenoy ◽  
R.M. de la Rue
Keyword(s):  

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