Polycrystalline silicon film thickness measurement from analysis of visible reflectance spectra
1979 ◽
Vol 69
(8)
◽
pp. 1143
◽
1993 ◽
Vol 64
(8)
◽
pp. 2405-2406
◽
1990 ◽
Vol 29
(Part 2, No. 4)
◽
pp. L548-L551
◽
Keyword(s):
1994 ◽
Vol 68-69
◽
pp. 394-397
◽