In situ monitoring technique for fabrication of high-quality diffraction gratings

1988 ◽  
Vol 13 (1) ◽  
pp. 7 ◽  
Author(s):  
Yoshiaki Nakano ◽  
Kunio Tada
1995 ◽  
Vol 377 ◽  
Author(s):  
M. Azuma ◽  
K. Nakamura ◽  
T. Yokoi ◽  
K. Yoshino ◽  
I. Shimizu

ABSTRACTHigh quality a-Si:H thin films with varied optical gaps in the range from 1.55 to 2.1 eV were fabricated by various methods, i.e., the standard RF glow discharge of silane, “Chemical Annealing” and ECR-H-plasma from SiCl2H2 under in situ monitoring with an ellipsome try. Despite marked differences in the local structure, all these films showed low defect density as low as (3–5) × 1015 cm3. In addition, the stability for light soaking was improved markedly for the films made by promoting intensively structural relaxation with atomic hydrogen.


Talanta ◽  
2008 ◽  
Vol 75 (5) ◽  
pp. 1356-1361 ◽  
Author(s):  
L RODRIGUES ◽  
L VIEIRA ◽  
J CARDOSO ◽  
J MENEZES

1993 ◽  
Vol 334 ◽  
Author(s):  
K. Endo ◽  
F. Hosseini Teherani ◽  
S. Yoshida ◽  
K. Kajimura ◽  
Y. Moriyasu

AbstractWe have succeeded in in-situ growth of YBCO superconducting films by developing a new MOMBE technique which employs in-situ monitoring of RHEED intensity. The X-ray diffraction pattern showed peaks corresponding to those calculated from the Laue function which indicates the high quality of films grown using MOMBE. AFM and RHEED oscillations show 2-dimensional unit cell by unit cell growth.


The Analyst ◽  
2017 ◽  
Vol 142 (5) ◽  
pp. 740-744 ◽  
Author(s):  
M. Schwenk ◽  
A. Katzir ◽  
B. Mizaikoff

Mid-infrared fiber-optic evanescent field spectroscopy (MIR-FEFS) has been applied as an in situ monitoring technique for THF containing clathrate hydrates.


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