Microscopic TV Holography for Microsystems Metrology

The continuously advancing Micro-Electro-Mechanical Systems (MEMS) technology requires a robust non-contact quantitative measurement system for the characterization of their performance, reliability and integrity. A TV holographic system with long working distance microscope is developed for the static, dynamic and 3-D surface profile characterization of Microsystems. The system can be operated either in continuous or stroboscopic illumination mode of operation. In this paper we present the development of a microscopic imaging system and its applications for Microsystems Metrology.Defence Science Journal, 2011, 61(5), pp.491-498, DOI:http://dx.doi.org/10.14429/dsj.61.908

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Toward Operations in a Surgical Scenario: Characterization of a Microgripper via Light Microscopy Approach

Applied Sciences ◽

10.3390/app9091901 ◽

2019 ◽

Vol 9 (9) ◽

pp. 1901 ◽

Cited By ~ 3

Author(s):

Federica Vurchio ◽

Pietro Ursi ◽

Francesco Orsini ◽

Andrea Scorza ◽

Rocco Crescenzi ◽

...

Keyword(s):

Electron Microscope ◽

Statistical Analysis ◽

Scanning Electron Microscope ◽

Light Microscopy ◽

Mechanical Systems ◽

Optical Microscope ◽

Micro Electro Mechanical Systems ◽

Mems Technology ◽

Scanning Electron

Micro Electro Mechanical Systems (MEMS)-Technology based micro mechanisms usually operate within a protected or encapsulated space and, before that, they are fabricated and analyzed within one Scanning Electron Microscope (SEM) vacuum specimen chamber. However, a surgical scenario is much more aggressive and requires several higher abilities in the microsystem, such as the capability of operating within a liquid or wet environment, accuracy, reliability and sophisticated packaging. Unfortunately, testing and characterizing MEMS experimentally without fundamental support of a SEM is rather challenging. This paper shows that in spite of large difficulties due to well-known physical limits, the optical microscope is still able to play an important role in MEMS characterization at room conditions. This outcome is supported by the statistical analysis of two series of measurements, obtained by a light trinocular microscope and a profilometer, respectively.

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The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine

Micromachines ◽

10.3390/mi12101261 ◽

2021 ◽

Vol 12 (10) ◽

pp. 1261

Author(s):

Young Chan Choi ◽

June Soo Kim ◽

Soon Yeol Kwon ◽

Seong Ho Kong

Keyword(s):

Wind Turbine ◽

Permanent Magnets ◽

Surface Profile ◽

Open Circuit ◽

Micro Electro Mechanical Systems ◽

Deep Reactive Ion Etching ◽

Mems Fabrication ◽

Mems Technology ◽

Etching Profile ◽

Circuit Output

In this paper we report on the improvement of performance by minimizing scallop size through deep reactive-ion etching (DRIE) of rotors in micro-wind turbines based on micro-electro-mechanical systems (MEMS) technology. The surface profile of an MEMS rotor can be controlled by modifying the scallop size of the DRIE surface through changing the process recipe. The fabrication of a planar disk-type MEMS rotor through the MEMS fabrication process was carried out, and for the comparison of the improvements in the performance of each rotor, RPM testing and open circuit output voltage experiments of stators and permanent magnets were performed. We found that the smooth etching profile with a minimized scallop size formed using DRIE results in improved rotation properties in MEMS-based wind turbine rotors.

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Morpho-molecular ex vivo detection and grading of non-muscle-invasive bladder cancer using forward imaging probe based multimodal optical coherence tomography and Raman spectroscopy

The Analyst ◽

10.1039/c9an01911a ◽

2020 ◽

Vol 145 (4) ◽

pp. 1445-1456 ◽

Cited By ~ 1

Author(s):

Fabian Placzek ◽

Eliana Cordero Bautista ◽

Simon Kretschmer ◽

Lara M. Wurster ◽

Florian Knorr ◽

...

Keyword(s):

Raman Spectroscopy ◽

Optical Coherence Tomography ◽

Imaging System ◽

Ex Vivo ◽

Large Field ◽

Optical Coherence ◽

Fiber Optic Probe ◽

Optic Probe ◽

Muscle Invasive

Characterization of bladder biopsies, using a combined fiber optic probe-based optical coherence tomography and Raman spectroscopy imaging system that allows a large field-of-view imaging and detection and grading of cancerous bladder lesions.

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Dynamic Modeling and Anti-Disturbing Control of an Electromagnetic MEMS Torsional Micromirror Considering External Vibrations in Vehicular LiDAR

Micromachines ◽

10.3390/mi12010069 ◽

2021 ◽

Vol 12 (1) ◽

pp. 69

Author(s):

Yong Hua ◽

Shuangyuan Wang ◽

Bingchu Li ◽

Guozhen Bai ◽

Pengju Zhang

Keyword(s):

Dynamic Model ◽

Optical Switching ◽

Control Method ◽

Sliding Mode ◽

Algorithm Design ◽

Coupling Model ◽

Micro Electro Mechanical Systems ◽

Mems Technology ◽

Torsional Micromirror ◽

Dynamic Coupling Model

Micromirrors based on micro-electro-mechanical systems (MEMS) technology are widely employed in different areas, such as optical switching and medical scan imaging. As the key component of MEMS LiDAR, electromagnetic MEMS torsional micromirrors have the advantages of small size, a simple structure, and low energy consumption. However, MEMS micromirrors face severe disturbances due to vehicular vibrations in realistic use situations. The paper deals with the precise motion control of MEMS micromirrors, considering external vibration. A dynamic model of MEMS micromirrors, considering the coupling between vibration and torsion, is proposed. The coefficients in the dynamic model were identified using the experimental method. A feedforward sliding mode control method (FSMC) is proposed in this paper. By establishing the dynamic coupling model of electromagnetic MEMS torsional micromirrors, the proposed FSMC is evaluated considering external vibrations, and compared with conventional proportion-integral-derivative (PID) controls in terms of robustness and accuracy. The simulation experiment results indicate that the FSMC controller has certain advantages over a PID controller. This paper revealed the coupling dynamic of MEMS micromirrors, which could be used for a dynamic analysis and a control algorithm design for MEMS micromirrors.

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W-band beam-steerable MEMS-based reflectarray

International Journal of Microwave and Wireless Technologies ◽

10.1017/s1759078711000754 ◽

2011 ◽

Vol 3 (5) ◽

pp. 521-532 ◽

Cited By ~ 3

Author(s):

Simone Montori ◽

Elisa Chiuppesi ◽

Paola Farinelli ◽

Luca Marcaccioli ◽

Roberto Vincenti Gatti ◽

...

Keyword(s):

Liquid Crystal ◽

Imaging System ◽

Elementary Cell ◽

Control Architecture ◽

Micro Electro Mechanical Systems ◽

Concealed Weapons ◽

W Band ◽

Innovative Solutions ◽

Wave Imaging ◽

The University

This paper presents recent advances on reconfigurable reflectarrays at the University of Perugia. In particular, the activities carried out in the framework of the FP7 project ARASCOM (“MEMS and Liquid Crystal based” Agile Reflectarray Antennas for Security and COMmunication). As for ARASCOM outcomes, the purpose of the project is the design of a very large reconfigurable reflectarray controlled with micro-electro-mechanical systems (MEMS) for mm-wave imaging system at 76.5 GHz. A system with sufficient resolution to detect concealed weapons impose challenging requirements on the antenna, which shall be made of hundreds of thousands elements. The problem has been addressed by exploiting some innovative solutions and architectures that will be described in this document. In particular, the dimensioning of the reflectarray, the proposed 1-bit geometry of elementary cell, and the innovative biasing control architecture are reported together with the MEMS design and fabrication and the experimental results of a demonstrating board that validated the adopted procedure.

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