X-ray photoelectron spectroscopy (XPS) for in situ characterization of thin film growth

2011 ◽  
pp. 75-98 ◽  
Author(s):  
H. Bluhm
Keyword(s):  
Thin Film ◽  
Photoelectron Spectroscopy ◽  
Film Growth ◽  
Thin Film Growth ◽  
In Situ Characterization ◽  
X Ray

Soft x-ray spectrometer for in situ monitoring of thin-film growth

1994 ◽  
Author(s):  
Per Skytt ◽  
Carl J. Englund ◽  
Nial Wassdahl ◽  
Derrick C. Mancini ◽  
Joseph Nordgren
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth ◽  
In Situ Monitoring ◽  
X Ray

In-Situ Synchrotron X-Ray Scattering Study of Thin Film Growth by Atomic Layer Deposition

2011 ◽  
Vol 11 (2) ◽  
pp. 1577-1580 ◽  
Author(s):  
Yong Jun Park ◽  
Dong Ryeol Lee ◽  
Hyun Hwi Lee ◽  
Han-Bo-Ram Lee ◽  
Hyungjun Kim ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Film Growth ◽  
Atomic Layer ◽  
Thin Film Growth ◽  
X Ray ◽  
X Ray Scattering ◽  
Layer Deposition ◽  
Scattering Study

In situ X-ray investigations of thin film growth

1998 ◽  
Vol 324 (1-2) ◽  
pp. 63-67 ◽  
Author(s):  
A.M. Baranov ◽  
I.F. Mikhailov
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth ◽  
X Ray
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