scholarly journals Resolving the Evolution of Atomic Layer-Deposited Thin-Film Growth by Continuous In Situ X-Ray Absorption Spectroscopy

2021 ◽  
Author(s):  
Xiaohui Qu ◽  
Danhua Yan ◽  
Ruoshui Li ◽  
Jiajie Cen ◽  
Chenyu Zhou ◽  
...  
Keyword(s):  
Thin Film ◽  
Absorption Spectroscopy ◽  
Film Growth ◽  
Atomic Layer ◽  
Thin Film Growth ◽  
X Ray ◽  
X Ray Absorption

Early stages of TiN thin film growth probed using in-situ soft X-ray absorption spectroscopy

2017 ◽  
Author(s):  
Rachana Gupta ◽  
Mukul Gupta ◽  
D. M. Phase
Keyword(s):  
Thin Film ◽  
Absorption Spectroscopy ◽  
Film Growth ◽  
Thin Film Growth ◽  
X Ray ◽  
Early Stages ◽  
X Ray Absorption

In situ infrared absorption spectroscopy for thin film growth by atomic layer deposition

2006 ◽  
Author(s):  
Yu Wang ◽  
Min Dai ◽  
Sandrine Rivillon ◽  
Ming-Tsung Ho ◽  
Yves J. Chabal
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Absorption Spectroscopy ◽  
Infrared Absorption ◽  
Film Growth ◽  
Atomic Layer ◽  
Thin Film Growth ◽  
Infrared Absorption Spectroscopy ◽  
Layer Deposition

In-Situ Synchrotron X-Ray Scattering Study of Thin Film Growth by Atomic Layer Deposition

2011 ◽  
Vol 11 (2) ◽  
pp. 1577-1580 ◽  
Author(s):  
Yong Jun Park ◽  
Dong Ryeol Lee ◽  
Hyun Hwi Lee ◽  
Han-Bo-Ram Lee ◽  
Hyungjun Kim ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Film Growth ◽  
Atomic Layer ◽  
Thin Film Growth ◽  
X Ray ◽  
X Ray Scattering ◽  
Layer Deposition ◽  
Scattering Study

In situstructural study of thin-film growth by quick-scanning extended x-ray-absorption spectroscopy

1991 ◽  
Vol 44 (6) ◽  
pp. 2822-2825 ◽  
Author(s):  
R. Frahm ◽  
T. W. Barbee ◽  
W. Warburton
Keyword(s):  
Thin Film ◽  
Absorption Spectroscopy ◽  
Film Growth ◽  
Thin Film Growth ◽  
X Ray ◽  
X Ray Absorption

Development of a scanning probe microscopy integrated atomic layer deposition system for in situ successive monitoring of thin film growth

2018 ◽  
Vol 89 (12) ◽  
pp. 123702 ◽  
Author(s):  
Kun Cao ◽  
Quan Hu ◽  
Jiaming Cai ◽  
Miao Gong ◽  
Jianfeng Yang ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Scanning Probe Microscopy ◽  
Film Growth ◽  
Atomic Layer ◽  
Thin Film Growth ◽  
Scanning Probe ◽  
Probe Microscopy ◽  
Layer Deposition

In situ X-ray reflectivity measurement of thin film growth during vacuum deposition

1996 ◽  
Vol 92 ◽  
pp. 282-286 ◽  
Author(s):  
Chih-Hao Lee ◽  
Sung-Yuh Tseng
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth ◽  
Vacuum Deposition ◽  
Reflectivity Measurement ◽  
X Ray

Soft x-ray spectrometer for in situ monitoring of thin-film growth

1994 ◽  
Author(s):  
Per Skytt ◽  
Carl J. Englund ◽  
Nial Wassdahl ◽  
Derrick C. Mancini ◽  
Joseph Nordgren
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth ◽  
In Situ Monitoring ◽  
X Ray

In situ X-ray investigations of thin film growth

1998 ◽  
Vol 324 (1-2) ◽  
pp. 63-67 ◽  
Author(s):  
A.M. Baranov ◽  
I.F. Mikhailov
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth ◽  
X Ray

In-situ monitoring of electro-deposition for iron-nickle thin film by time-resolved X-ray absorption spectroscopy

2018 ◽  
Vol 5 (5) ◽  
pp. 10997-11003 ◽  
Author(s):  
Wanwisa Limphirat ◽  
W. Inprasit ◽  
T. Juagwon ◽  
P. Prachopchok ◽  
M. Duriyarattakarn ◽  
...  
Keyword(s):  
Thin Film ◽  
Absorption Spectroscopy ◽  
In Situ Monitoring ◽  
Time Resolved ◽  
Electro Deposition ◽  
X Ray ◽  
X Ray Absorption
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