scholarly journals Development of the Oil Filled High Pressure Sensor Using a Silicon Piezoresistive Strain Gauge

1989 ◽  
Vol 25 (5) ◽  
pp. 524-530 ◽  
Author(s):  
Satoshi SHIMADA ◽  
Norio ICHIKAWA ◽  
Tetsuo KUMAZAWA ◽  
Ken MURAYAMA
Keyword(s):  
High Pressure ◽  
Pressure Sensor ◽  
Strain Gauge

Metal Strain Gauge Pressure Sensor Using SiO2/Si3N4 Diaphragm

2019 ◽  
Vol 139 (4) ◽  
pp. 63-68
Author(s):  
Hiroshi Nakano ◽  
Masahiro Matsumoto ◽  
Yasuo Onose ◽  
Kazuhiro Ohta
Keyword(s):  
Pressure Sensor ◽  
Strain Gauge ◽  
Gauge Pressure ◽  
Metal Strain

scholarly journals Simulation and Nonlinearity Optimization of a High-Pressure Sensor

Sensors ◽  
2020 ◽  
Vol 20 (16) ◽  
pp. 4419
Author(s):  
Ting Li ◽  
Haiping Shang ◽  
Weibing Wang
Keyword(s):  
High Pressure ◽  
Pressure Sensor ◽  
Pressure Sensors ◽  
Original Model ◽  
Ansys Software ◽  
Nonlinear Error ◽  
Sensor Model ◽  
Optimized Model ◽  
Simulation Results ◽  
Better Than

A pressure sensor in the range of 0–120 MPa with a square diaphragm was designed and fabricated, which was isolated by the oil-filled package. The nonlinearity of the device without circuit compensation is better than 0.4%, and the accuracy is 0.43%. This sensor model was simulated by ANSYS software. Based on this model, we simulated the output voltage and nonlinearity when piezoresistors locations change. The simulation results showed that as the stress of the longitudinal resistor (RL) was increased compared to the transverse resistor (RT), the nonlinear error of the pressure sensor would first decrease to about 0 and then increase. The theoretical calculation and mathematical fitting were given to this phenomenon. Based on this discovery, a method for optimizing the nonlinearity of high-pressure sensors while ensuring the maximum sensitivity was proposed. In the simulation, the output of the optimized model had a significant improvement over the original model, and the nonlinear error significantly decreased from 0.106% to 0.0000713%.

Investigation of Interface Oil Insufficiency in a Strain Gauge Type Pressure Sensor

2022 ◽  
Vol 23 (1) ◽  
Author(s):  
Kamran Soltani ◽  
Ghader Rezazadeh ◽  
Manus Henry ◽  
Oleg Bushuev
Keyword(s):  
Pressure Sensor ◽  
Strain Gauge ◽  
Type Pressure

scholarly journals A Fluidic-Based High-Pressure Sensor Interrogated by Microwave Fabry–Perot Interferometry

2017 ◽  
Vol 17 (14) ◽  
pp. 4388-4393 ◽  
Author(s):  
Wenge Zhu ◽  
Baokai Cheng ◽  
Yurong Li ◽  
Runar Nygaard ◽  
Hai Xiao
Keyword(s):  
High Pressure ◽  
Pressure Sensor ◽  
Fabry Perot

scholarly journals A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement

Sensors ◽  
2018 ◽  
Vol 18 (3) ◽  
pp. 736 ◽  
Author(s):  
Guodong Zhang ◽  
Yulong Zhao ◽  
Yun Zhao ◽  
Xinchen Wang ◽  
Xueyong Wei ◽  
...  
Keyword(s):  
Thin Film ◽  
High Pressure ◽  
Pressure Sensor ◽  
Pressure Measurement ◽  
Detonation Pressure ◽  
Ultra High Pressure

First Unsteady Pressure Measurements With a Fast Response Cooled Total Pressure Probe in High Temperature Gas Turbine Environments

2010 ◽  
Author(s):  
Mehmet Mersinligil ◽  
Jean-Franc¸ois Brouckaert ◽  
Julien Desset
Keyword(s):  
High Pressure ◽  
Pressure Sensor ◽  
Total Pressure ◽  
Fast Response ◽  
Design Stage ◽  
Absolute Pressure ◽  
Pressure Probe ◽  
Probe Design ◽  
Flame Tube ◽  
Blade Passing Frequency

This paper presents the first experimental engine and test rig results obtained from a fast response cooled total pressure probe. The first objective of the probe design was to favor continuous immersion of the probe into the engine to obtain time series of pressure with a high bandwidth and therefore statistically representative average fluctuations at the blade passing frequency. The probe is water cooled by a high pressure cooling system and uses a conventional piezo-resistive pressure sensor which yields therefore both time-averaged and time-resolved pressures. The initial design target was to gain the capability of performing measurements at the temperature conditions typically found at high pressure turbine exit (1100–1400K) with a bandwidth of at least 40kHz and in the long term at combustor exit (2000K or higher). The probe was first traversed at the turbine exit of a Rolls-Royce Viper turbojet engine, at exhaust temperatures around 750 °C and absolute pressure of 2.1bars. The probe was able to resolve the high blade passing frequency (≈23kHz) and several harmonics up to 100kHz. Besides the average total pressure distributions from the radial traverses, phase-locked averages and random unsteadiness are presented. The probe was also used in a virtual three-hole mode yielding unsteady yaw angle, static pressure and Mach number. The same probe was used for measurements in a Rolls-Royce intermediate pressure burner rig. Traverses were performed inside the flame tube of a kerosene burner at temperatures above 1600 °C. The probe successfully measured the total pressure distribution in the flame tube and typical frequencies of combustion instabilities were identified during rumble conditions. The cooling performance of the probe is compared to estimations at the design stage and found to be in good agreement. The frequency response of the probe is compared to cold shock tube results and a significant increase in the natural frequency of the line-cavity system formed by the conduction cooled screen in front of the miniature pressure sensor were observed.

Design, development and performance evaluation of pressure sensor using eddy current displacement sensing coil

Sensor Review ◽  
2018 ◽  
Vol 38 (2) ◽  
pp. 248-258
Author(s):  
Gobi K. ◽  
Kannapiran B. ◽  
Devaraj D. ◽  
Valarmathi K.
Keyword(s):  
Performance Evaluation ◽  
Eddy Current ◽  
Pressure Sensor ◽  
Strain Gauge ◽  
Pressure Sensors ◽  
Calibration Data ◽  
Position Measurement ◽  
Content Type ◽  
Short Period ◽  
Type Pressure

Purpose The conventional strain gauge type pressure sensor suffers in static testing of engines due to the contact transduction method. This paper aims to focus on the concept of non-contact transduction-based pressure sensor using eddy current displacement sensing coil (ECDS) to overcome the temperature limitations of the strain gauge type pressure sensor. This paper includes the fabrication of prototypes of the proposed pressure sensor and its performance evaluation by static calibration. The fabricated pressure sensor is proposed to measure pressure in static test environment for a short period in the order of few seconds. The limitations of the fabricated pressure sensor related to temperature problems are highlighted and the suitable design changes are recommended to aid the future design. Design/methodology/approach The design of ECDS-based pressure sensor is aimed to provide non-contact transduction to overcome the limitations of the strain gauge type of pressure sensor. The ECDS is designed and fabricated with two configurations to measure deflection of the diaphragm corresponding to the applied pressure. The fabricated ECDS is calibrated using a standard micro meter to ensure transduction within limits. The fabricated prototypes of pressure sensors are calibrated using dead weight tester, and the calibration results are analyzed to select the best configuration. The proposed pressure sensor is tested at different temperatures, and the test results are analyzed to provide recommendations to overcome the shortcomings. Findings The performance of the different configurations of the pressure sensor using ECDS is evaluated using the calibration data. The analysis of the calibration results indicates that the pressure sensor using ECDS (coil-B) with the diaphragm as target is the best configuration. The accuracy of the fabricated pressure sensor with best configuration is ±2.8 per cent and the full scale (FS) output is 3.8 KHz. The designed non-contact transduction method extends the operating temperature of the pressure sensor up to 150°C with the specified accuracy for the short period. Originality/value Most studies of eddy current sensing coil focus on the displacement and position measurement but not on the pressure measurement. This paper is concerned with the design of the pressure sensor using ECDS to realize the non-contact transduction to overcome the limitations of strain gauge type pressure sensors and evaluation of the fabricated prototypes. It is shown that the accuracy of the proposed pressure sensor is not affected by the high temperature for the short period due to non-contact transduction using ECDS.

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