Three-dimensional micromachining of silicon pressure sensor integrating resonant strain gauge on diaphragm

1990 ◽  
Vol 23 (1-3) ◽  
pp. 1007-1010 ◽  
Author(s):  
Kyoichi Ikeda ◽  
Hideki Kuwayama ◽  
Takashi Kobayashi ◽  
Teysuya Watanabe ◽  
Tadashi Nishikawa ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Strain Gauge ◽  
Three Dimensional

Metal Strain Gauge Pressure Sensor Using SiO2/Si3N4 Diaphragm

2019 ◽  
Vol 139 (4) ◽  
pp. 63-68
Author(s):  
Hiroshi Nakano ◽  
Masahiro Matsumoto ◽  
Yasuo Onose ◽  
Kazuhiro Ohta
Keyword(s):  
Pressure Sensor ◽  
Strain Gauge ◽  
Gauge Pressure ◽  
Metal Strain

CREATING AN OVER PRESSURE SENSOR METRAN-43 DI WITH THE KOMPAS-3D PROGRAM

2019 ◽  
Author(s):  
Roman Grishin ◽  
Dmitriy Nesnov
Keyword(s):  
Pressure Sensor ◽  
Three Dimensional ◽  
Dimensional Model ◽  
Three Dimensional Model ◽  
Graphic Editor ◽  
The Creation ◽  
Photorealistic Images

This article describes the creation of a three-dimensional model of the overpressure sensor Metran-43 using the graphic editor COMPASS-v17, as well as photorealistic images in the program Artisan Rendering and created animation disassembly-Assembly of the device, allowing you to see the internal components of the product.

scholarly journals A flexible and highly sensitive pressure sensor based on three-dimensional electrospun carbon nanofibers

RSC Advances ◽  
2021 ◽  
Vol 11 (23) ◽  
pp. 13898-13905
Author(s):  
Chuan Cai ◽  
He Gong ◽  
Weiping Li ◽  
Feng Gao ◽  
Qiushi Jiang ◽  
...  
Keyword(s):  
Carbon Nanofibers ◽  
Pressure Sensor ◽  
Carbon Nanofiber ◽  
Three Dimensional ◽  
High Sensitivity ◽  
Highly Sensitive ◽  
Sensitive Pressure

A three-dimensional electrospun carbon nanofiber network was used to measure press strains with high sensitivity.

scholarly journals Origin and Application of the Twinned Calcite Strain Gauge

Geosciences ◽  
2021 ◽  
Vol 11 (7) ◽  
pp. 296
Author(s):  
Richard H. Groshong
Keyword(s):  
Stress Analysis ◽  
Strain Gauge ◽  
Strain Tensor ◽  
Three Dimensional ◽  
Constant Strain Rate ◽  
Axis Orientation ◽  
Order Of Magnitude ◽  
Rate Experiment ◽  
Strain Axis ◽  
Expected Values

This paper is a personal account of the origin and development of the twinned-calcite strain gauge, its experimental verification, and its relationship to stress analysis. The method allows the calculation of the three-dimensional deviatoric strain tensor based on five or more twin sets. A minimum of about 25 twin sets should provide a reasonably accurate result for the magnitude and orientation of the strain tensor. The opposite-signed strain axis orientation is the most accurately located. Where one strain axis is appreciably different from the other two, that axis is generally within about 10° of the correct value. Experiments confirm a magnitude accuracy of 1% strain over the range of 1–12% axial shortening and that samples with more than 40% negative expected values imply multiple or rotational deformations. If two deformations are at a high angle to one another, the strain calculated from the positive and negative expected values separately provides a good estimate of both deformations. Most stress analysis techniques do not provide useful magnitudes, although most provide a good estimate of the principal strain axis directions. Stress analysis based on the number of twin sets per grain provides a better than order-of-magnitude approximation to the differential stress magnitude in a constant strain rate experiment.

scholarly journals Three-Dimensional Arterial Pulse Signal Acquisition in Time Domain Using Flexible Pressure-Sensor Dense Arrays

Micromachines ◽  
2021 ◽  
Vol 12 (5) ◽  
pp. 569
Author(s):  
Jianzhong Chen ◽  
Ke Sun ◽  
Rong Zheng ◽  
Yi Sun ◽  
Heng Yang ◽  
...  
Keyword(s):  
Radial Artery ◽  
Pressure Sensor ◽  
Pulse Width ◽  
Printed Circuit Boards ◽  
Color Doppler ◽  
Three Dimensional ◽  
Pressure Sensors ◽  
Sensor Arrays ◽  
Signal Acquisition ◽  
Dynamic Pulse

In this study, we developed a radial artery pulse acquisition system based on finger-worn dense pressure sensor arrays to enable three-dimensional pulse signals acquisition. The finger-worn dense pressure-sensor arrays were fabricated by packaging 18 ultra-small MEMS pressure sensors (0.4 mm × 0.4 mm × 0.2 mm each) with a pitch of 0.65 mm on flexible printed circuit boards. Pulse signals are measured and recorded simultaneously when traditional Chinese medicine practitioners wear the arrays on the fingers while palpating the radial pulse. Given that the pitches are much smaller than the diameter of the human radial artery, three-dimensional pulse envelope images can be measured with the system, as can the width and the dynamic width of the pulse signals. Furthermore, the array has an effective span of 11.6 mm—3–5 times the diameter of the radial artery—which enables easy and accurate positioning of the sensor array on the radial artery. This study also outlines proposed methods for measuring the pulse width and dynamic pulse width. The dynamic pulse widths of three volunteers were measured, and the dynamic pulse width measurements were consistent with those obtained by color Doppler ultrasound. The pulse wave velocity can also be measured with the system by measuring the pulse transit time between the pulse signals at the brachial and radial arteries using the finger-worn sensor arrays.

Investigation of Interface Oil Insufficiency in a Strain Gauge Type Pressure Sensor

2022 ◽  
Vol 23 (1) ◽  
Author(s):  
Kamran Soltani ◽  
Ghader Rezazadeh ◽  
Manus Henry ◽  
Oleg Bushuev
Keyword(s):  
Pressure Sensor ◽  
Strain Gauge ◽  
Type Pressure

Design, development and performance evaluation of pressure sensor using eddy current displacement sensing coil

Sensor Review ◽  
2018 ◽  
Vol 38 (2) ◽  
pp. 248-258
Author(s):  
Gobi K. ◽  
Kannapiran B. ◽  
Devaraj D. ◽  
Valarmathi K.
Keyword(s):  
Performance Evaluation ◽  
Eddy Current ◽  
Pressure Sensor ◽  
Strain Gauge ◽  
Pressure Sensors ◽  
Calibration Data ◽  
Position Measurement ◽  
Content Type ◽  
Short Period ◽  
Type Pressure

Purpose The conventional strain gauge type pressure sensor suffers in static testing of engines due to the contact transduction method. This paper aims to focus on the concept of non-contact transduction-based pressure sensor using eddy current displacement sensing coil (ECDS) to overcome the temperature limitations of the strain gauge type pressure sensor. This paper includes the fabrication of prototypes of the proposed pressure sensor and its performance evaluation by static calibration. The fabricated pressure sensor is proposed to measure pressure in static test environment for a short period in the order of few seconds. The limitations of the fabricated pressure sensor related to temperature problems are highlighted and the suitable design changes are recommended to aid the future design. Design/methodology/approach The design of ECDS-based pressure sensor is aimed to provide non-contact transduction to overcome the limitations of the strain gauge type of pressure sensor. The ECDS is designed and fabricated with two configurations to measure deflection of the diaphragm corresponding to the applied pressure. The fabricated ECDS is calibrated using a standard micro meter to ensure transduction within limits. The fabricated prototypes of pressure sensors are calibrated using dead weight tester, and the calibration results are analyzed to select the best configuration. The proposed pressure sensor is tested at different temperatures, and the test results are analyzed to provide recommendations to overcome the shortcomings. Findings The performance of the different configurations of the pressure sensor using ECDS is evaluated using the calibration data. The analysis of the calibration results indicates that the pressure sensor using ECDS (coil-B) with the diaphragm as target is the best configuration. The accuracy of the fabricated pressure sensor with best configuration is ±2.8 per cent and the full scale (FS) output is 3.8 KHz. The designed non-contact transduction method extends the operating temperature of the pressure sensor up to 150°C with the specified accuracy for the short period. Originality/value Most studies of eddy current sensing coil focus on the displacement and position measurement but not on the pressure measurement. This paper is concerned with the design of the pressure sensor using ECDS to realize the non-contact transduction to overcome the limitations of strain gauge type pressure sensors and evaluation of the fabricated prototypes. It is shown that the accuracy of the proposed pressure sensor is not affected by the high temperature for the short period due to non-contact transduction using ECDS.

scholarly journals A Highly Sensitive and Flexible Capacitive Pressure Sensor Based on a Porous Three-Dimensional PDMS/Microsphere Composite

Polymers ◽  
2020 ◽  
Vol 12 (6) ◽  
pp. 1412 ◽  
Author(s):  
Young Jung ◽  
Wookjin Lee ◽  
Kyungkuk Jung ◽  
Byunggeon Park ◽  
Jinhyoung Park ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Sacrificial Layer ◽  
Three Dimensional ◽  
Pressure Sensors ◽  
Capacitive Pressure Sensor ◽  
Mechanical Stimuli ◽  
Highly Sensitive ◽  
Flexible Pressure Sensors ◽  
Fast Rise ◽  
Better Than

In recent times, polymer-based flexible pressure sensors have been attracting a lot of attention because of their various applications. A highly sensitive and flexible sensor is suggested, capable of being attached to the human body, based on a three-dimensional dielectric elastomeric structure of polydimethylsiloxane (PDMS) and microsphere composite. This sensor has maximal porosity due to macropores created by sacrificial layer grains and micropores generated by microspheres pre-mixed with PDMS, allowing it to operate at a wider pressure range (~150 kPa) while maintaining a sensitivity (of 0.124 kPa−1 in a range of 0~15 kPa) better than in previous studies. The maximized pores can cause deformation in the structure, allowing for the detection of small changes in pressure. In addition to exhibiting a fast rise time (~167 ms) and fall time (~117 ms), as well as excellent reproducibility, the fabricated pressure sensor exhibits reliability in its response to repeated mechanical stimuli (2.5 kPa, 1000 cycles). As an application, we develop a wearable device for monitoring repeated tiny motions, such as the pulse on the human neck and swallowing at the Adam’s apple. This sensory device is also used to detect movements in the index finger and to monitor an insole system in real-time.

scholarly journals Development of the Oil Filled High Pressure Sensor Using a Silicon Piezoresistive Strain Gauge

1989 ◽  
Vol 25 (5) ◽  
pp. 524-530 ◽  
Author(s):  
Satoshi SHIMADA ◽  
Norio ICHIKAWA ◽  
Tetsuo KUMAZAWA ◽  
Ken MURAYAMA
Keyword(s):  
High Pressure ◽  
Pressure Sensor ◽  
Strain Gauge
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