Miniaturized pressure sensor using a free hanging strain-gauge with leverage effect for increased sensitivity

Purpose The conventional strain gauge type pressure sensor suffers in static testing of engines due to the contact transduction method. This paper aims to focus on the concept of non-contact transduction-based pressure sensor using eddy current displacement sensing coil (ECDS) to overcome the temperature limitations of the strain gauge type pressure sensor. This paper includes the fabrication of prototypes of the proposed pressure sensor and its performance evaluation by static calibration. The fabricated pressure sensor is proposed to measure pressure in static test environment for a short period in the order of few seconds. The limitations of the fabricated pressure sensor related to temperature problems are highlighted and the suitable design changes are recommended to aid the future design. Design/methodology/approach The design of ECDS-based pressure sensor is aimed to provide non-contact transduction to overcome the limitations of the strain gauge type of pressure sensor. The ECDS is designed and fabricated with two configurations to measure deflection of the diaphragm corresponding to the applied pressure. The fabricated ECDS is calibrated using a standard micro meter to ensure transduction within limits. The fabricated prototypes of pressure sensors are calibrated using dead weight tester, and the calibration results are analyzed to select the best configuration. The proposed pressure sensor is tested at different temperatures, and the test results are analyzed to provide recommendations to overcome the shortcomings. Findings The performance of the different configurations of the pressure sensor using ECDS is evaluated using the calibration data. The analysis of the calibration results indicates that the pressure sensor using ECDS (coil-B) with the diaphragm as target is the best configuration. The accuracy of the fabricated pressure sensor with best configuration is ±2.8 per cent and the full scale (FS) output is 3.8 KHz. The designed non-contact transduction method extends the operating temperature of the pressure sensor up to 150°C with the specified accuracy for the short period. Originality/value Most studies of eddy current sensing coil focus on the displacement and position measurement but not on the pressure measurement. This paper is concerned with the design of the pressure sensor using ECDS to realize the non-contact transduction to overcome the limitations of strain gauge type pressure sensors and evaluation of the fabricated prototypes. It is shown that the accuracy of the proposed pressure sensor is not affected by the high temperature for the short period due to non-contact transduction using ECDS.

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Development of the Oil Filled High Pressure Sensor Using a Silicon Piezoresistive Strain Gauge

Transactions of the Society of Instrument and Control Engineers ◽

10.9746/sicetr1965.25.524 ◽

1989 ◽

Vol 25 (5) ◽

pp. 524-530 ◽

Cited By ~ 1

Author(s):

Satoshi SHIMADA ◽

Norio ICHIKAWA ◽

Tetsuo KUMAZAWA ◽

Ken MURAYAMA

Keyword(s):

High Pressure ◽

Pressure Sensor ◽

Strain Gauge

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Three-dimensional micromachining of silicon pressure sensor integrating resonant strain gauge on diaphragm

Sensors and Actuators A Physical ◽

10.1016/0924-4247(90)87078-w ◽

1990 ◽

Vol 23 (1-3) ◽

pp. 1007-1010 ◽

Cited By ~ 56

Author(s):

Kyoichi Ikeda ◽

Hideki Kuwayama ◽

Takashi Kobayashi ◽

Teysuya Watanabe ◽

Tadashi Nishikawa ◽

...

Keyword(s):

Pressure Sensor ◽

Strain Gauge ◽

Three Dimensional

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Silicon pressure sensor integrates resonant strain gauge on diaphragm

Sensors and Actuators A Physical ◽

10.1016/0924-4247(90)85028-3 ◽

1990 ◽

Vol 21 (1-3) ◽

pp. 146-150 ◽

Cited By ~ 89

Author(s):

Kyoichi Ikeda ◽

Hideki Kuwayama ◽

Takashi Kobayashi ◽

Tetsuya Watanabe ◽

Tadashi Nishikawa ◽

...

Keyword(s):

Pressure Sensor ◽

Strain Gauge

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Fabrication and evaluation of implantable pressure sensor using strain gauge

The 5th 2012 Biomedical Engineering International Conference ◽

10.1109/bmeicon.2012.6465487 ◽

2012 ◽

Author(s):

Jongchan Kim ◽

Hoyoung Lee ◽

Soondo Cha ◽

Bumkyoo Choi

Keyword(s):

Pressure Sensor ◽

Strain Gauge ◽

Implantable Pressure Sensor

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A SOI-MEMS Piezoresistive Atmosphere Pressure Sensor

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.562-565.394 ◽

2013 ◽

Vol 562-565 ◽

pp. 394-397

Author(s):

Li Dong Du ◽

Zhan Zhao ◽

Li Xiao ◽

Meng Ying Zhang ◽

Zhen Fang

Keyword(s):

Silicon Wafer ◽

Pressure Sensor ◽

Strain Gauge ◽

Pressure Sensors ◽

Micro Electro Mechanical System ◽

Silicon On Insulator ◽

Anodic Bonding ◽

Atmosphere Pressure ◽

Piezoresistive Pressure Sensor ◽

The Cost

In this paper, a SOI-MEMS (silicon on insulator- micro electro mechanical system) pizeoresistive atmosphere pressure sensor is presented using anodic bonding. Differently from the prevailing fabrication process of silicon piezoresistive pressure sensor: the device layer monocrystalline of SOI silicon wafer is used as the strain gauge with a simple deep etching process; and the SiO2 layer of SOI silicon wafer as the insulator between strain gauge and substrate. The whole fabrication processes of the designed sensor are very simple, and can reduce the cost of sensor. The Pressure-Voltage characteristic test results suggest a precision within 0.14% in linear fitting. It is shown that the temperature coefficient is 2718ppm/°C from the Typical temperature curve of the pressure sensors.

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Development of Rocket Telemetry in Chamber Gas Pressure Monitoring with the MPXV7002DP Gas Pressure Sensor

Journal of Electronics, Electromedical Engineering, and Medical Informatics ◽

10.35882/jeeemi.v2i3.3 ◽

2020 ◽

Vol 2 (3) ◽

pp. 103-107

Author(s):

Anggara Trisna Nugraha ◽

Dadang Priyambodo

Keyword(s):

Unmanned Aerial Vehicles ◽

Pressure Sensor ◽

Strain Gauge ◽

Gas Pressure ◽

Pressure Monitoring ◽

Aerial Vehicles ◽

Air Vehicle ◽

Measurement Results ◽

Strain Gauge Sensor ◽

Chamber Gas

Telemetry is a process used to measure or record a physical quantity at a location far from the center of processing the measurement results. Telemetry systems on unmanned aerial vehicles can provide information such as position, altitude, direction, and status of the vehicle itself in real time when the air vehicle is operated. A rocket is a flying vehicle that moves by getting a boost through the combustion reaction that occurs in the rocket. Implementation of the strain gauge sensor through the MPXV7002DP gas pressure sensor, the amount of gas pressure is obtained at the time of combustion of the rocket and sent via wi-fi telemetry Pixhawk 447 MHz, the data on a laptop can be shown the gas pressure generated in the rocket chamber through the display of the Borland Delphi program with a distance of 150 m.

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