The role of radiation in melt stability in zone-melt recrystallization of SOI
1990 ◽
Vol 5
(5)
◽
pp. 998-1002
◽
Keyword(s):
Under circumstances in Zone-Melt-Recrystallization (ZMR) of Si-on-Insulator (SOI) structures where radiative heat loss is significant, the ∼50% decrease in emissivity when Si melts destabilizes the Si molten zone. We have demonstrated this both experimentally using a slowly scanned e-beam line source and numerically with a finite-element computational simulation. The resulting instability narrows the process window and tightens requirements on beam control and background heating uniformity, both for e-beam ZMR systems and optically-coupled systems such as a graphite strip heater.
Keyword(s):
2018 ◽
Vol 5
(02)
◽
2021 ◽
Vol 122
◽
pp. 105156
Keyword(s):
Keyword(s):
2021 ◽
Vol 702
(1)
◽
pp. 012039