Effect of surface structures upon ultrathin film interference fringes

1993 ◽  
Vol 8 (9) ◽  
pp. 2315-2318
Author(s):  
Lu Taijing ◽  
Tomoya Ogawa ◽  
Koichi Toyoda ◽  
Zhenguo Wang

Effect of surface structures upon ultrathin film interference fringes generated from extremely thin films or epitaxial layers grown on semiconductor wafers has been studied. Since dark regions of fringes correspond to the places where the thin films are destroyed or absent, the fringes are investigated to detect uneven surfaces with undesired structures. Therefore, surface microstructures can be detected and characterized effectively by the modification of the fringes.

2010 ◽  
Vol 173 (1-3) ◽  
pp. 267-270 ◽  
Author(s):  
Ken-ichi Katsumata ◽  
Christopher E.J. Cordonier ◽  
Tetsuya Shichi ◽  
Akira Fujishima

1992 ◽  
Vol 7 (8) ◽  
pp. 2182-2185 ◽  
Author(s):  
Lu Taijing ◽  
Koichi Toyoda ◽  
Li Lian ◽  
Nobuhito Nango ◽  
Tomoya Ogawa

The existence and imperfection of several types of epitaxial layers and films on the substrate crystals were successfully detected and characterized nondestructively using a new interference fringes method. It was found that the interference fringes generated by amorphous thin films showed many very tiny bright spots that became discontinuous, which was quite different from the case of fringes generated by a crystalline epitaxially grown layer (smooth fringes). Multiple layers on a substrate were also observed by the fringes that were not concentric, but interlacing.


2013 ◽  
Author(s):  
Lu Huang ◽  
Jing Jin ◽  
Guohua Wang ◽  
Weimin Shi ◽  
Weiguang Yang ◽  
...  

2021 ◽  
Vol 2086 (1) ◽  
pp. 012170
Author(s):  
Irina G Bessonova ◽  
Pavel I Trofimov ◽  
Petr I Lazarenko ◽  
Demid A Kirilenko ◽  
Nikolay A Bert ◽  
...  

Abstract Planar photonic structures, such as gratings and metasurfaces, are routinely used for beam steering, waveguide coupling, and light localization. However, conventional fabrication techniques that involve lithography are demanding in terms of time and cost. Much cheaper and simpler methods for surface patterning and formation of periodic surface structures are enabled by direct laser processing. Here, we demonstrate low-cost rapid fabrication of high-quality phase gratings based on the formation of laser induced periodic surface structures (LIPSS, or ripples) in Ge2Sb2Te5 (GST) thin films. Due to unique phase change properties of GST, the structures demonstrate strong modulation of refractive index with period controlled by the wavelength of laser irradiation. We study the formation of phase change LIPSS in a broad range of excitation wavelengths and observe transition between regimes with different orientations of generated ripples with respect to laser polarization.


2020 ◽  
Vol 101 (13) ◽  
Author(s):  
Qiang Zhang ◽  
Dongxing Zheng ◽  
Yan Wen ◽  
Yuelei Zhao ◽  
Wenbo Mi ◽  
...  

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